CEI350: Semiconductor Manufacturing syllabus for ICE 2021 regulation (Professional Elective-VI)

Semiconductor Manufacturing detailed syllabus for Instrumentation & Control Engineering (ICE) for 2021 regulation curriculum has been taken from the Anna Universities official website and presented for the ICE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.

For Instrumentation & Control Engineering 6th Sem scheme and its subjects, do visit ICE 6th Sem 2021 regulation scheme. For Professional Elective-VI scheme and its subjects refer to ICE Professional Elective-VI syllabus scheme. The detailed syllabus of semiconductor manufacturing is as follows.

Course Objectives:

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Unit I

Historical perspective, processing overview, semiconductor materials, semiconductor devices, process technology, fabrication steps.

Unit II

Silicon crystal growth, material characterization, thermal oxidation process, impurity redistribution, masking properties of silicon dioxide, oxidation thickness characteristics.

Unit III

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Unit IV

Passive components, bipolar technology, MOSFET Technology, MESFET Technology, MEMS Technology.

Unit V

Electrical testing, packing, statistical process control, computer integrated manufacturing, challenges for integration, system-on-a-chip.

Skill Development Activities

(Group Seminar/Mini Project/Assignment/Content Preparation / Quiz/ Surprise Test / Solving
GATE questions/ etc)

  • Interpretation of Data Sheet of transistors and ICs with respect to their Static and Dynamic Characteristics.
  • Familiarization of any one relevant software tool (MATLAB/ SCILAB/ LABVIEW/ Proteus/Equivalent open source software)
  • Design and verification of simple signal conditioning circuit through simulation
  • *Realization of signal conditioning circuit in hardware
  • Introduction to other advanced logic circuits not covered in the above syllabus

Course Outcomes:

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Text Books:

  1. G. S. May and S. M. Sze, Fundamentals of Semiconductor Fabrication, Wiley India, 2004.
  2. Hong Xiao, Introduction to Semiconductor Manufacturing Technology – Second Edition, SPIE Press, 2012.

Reference Books:

  1. W. R. Runyan and K. E. Bean, Semiconductor Integrated Circuit Processing Technology, Addison Wesley Publishing Company, 1990
  2. S. A. Campbell, The Science and Engineering of Microelectronic Fabrication, Oxford University Press, 1996.
  3. M. J. Madou, Fundamentals of Micro fabrication, 2nd Edition, CRC Press, 2011.
  4. S. M. Sze, Semiconductor Devices: Physics and Technology, 2nd Ed., Wiley India,2011

List of Open Source Software/ Learning Website:


For detailed syllabus of all the other subjects of Instrumentation & Control Engineering 6th Sem, visit ICE 6th Sem subject syllabuses for 2021 regulation.

For all Instrumentation & Control Engineering results, visit Anna University ICE all semester results direct link.

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