Micro Electro Mechanical Systems and Nano Technology detailed syllabus for Production Engineering (Production) for 2019 regulation curriculum has been taken from the Anna Universities official website and presented for the Production students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Production Engineering 8th Sem scheme and its subjects, do visit Production 8th Sem 2019 regulation scheme. For Professional Elective-VII scheme and its subjects refer to Production Professional Elective-VII syllabus scheme. The detailed syllabus of micro electro mechanical systems and nano technology is as follows.
Course Objective:
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Unit I
Effect of Miniaturisation and Materials for Mems
Definition – historical development – fundamentals – Scaling laws in miniaturization – Rigid Body dynamics, Electrostatic Forces, Electromagnetic properties, Electricity, diffusion property, optical property and Heat Transfer, Materials for MEMS and Microsystems – Si, Si compounds, Si Piezo resistors, GaAs, Quartz, Piezoelectric Crystals and Polymers – Doping of semiconductors – diffusion process.
Unit II
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Unit III
Microsystem – Working Principle and Packaging
Micro sensors – Optical, Pressure, Acoustic wave and Thermal sensors – Micro actuation – thermal forces, shape memory alloys, piezoelectric crystals and Electrostatic Forces – MEMS with micro actuators – Micro gripper, Micro motor, micro valves and micro pumps – Micro accelerometers -Microfluidics – micro mirror array for video projection – Microsystem packaging – die level, device level and system level – Interfaces – Die preparation – surface bonding- wire bonding – sealing -Assembly of Microsystems – selection of packaging materials – signal mapping and transduction -pressure sensors packaging.
Unit IV
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Unit V
Nano Technology
Classification of nano structures – effect of the nanometer length scale effects of nano scale dimensions on various properties – structural, thermal, chemical, mechanical, magnetic, optical and electronic properties -Fabrication methods – Top down processes – bottom up processes – nano positioning systems.
Course Outcome:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
Text Books:
- Mahalik N P, MEMS, McGraw Hill (India), 2009
- Tai- Ran Hsu, “MEMS and Microsystems Design and Manufacture”, Tata-McGraw Hill, New Delhi, 2007.
References:
- Ananthasuresh G.K. Vinoy K.J. Gopalakrishnan S. Bhat K.N and Aatre V.K., “Microand smart systems”, Wiley India Pvt. Ltd., New Delhi, 2010
- Charles P Poole, Frank J Owens, “Introduction to Nano Technology”, John Wiley and Sons, 2003
- Julian W. Hardner, “Micro Sensors, Principles and Applications”, CRC Press 1993.
- Marc Madou , Fundamentals of Micro fabrication, CRC Press, New York, 2011.
- Mark Madou, “Fundamentals of Microfabrication”, CRC Press, New York, 1997.
For detailed syllabus of all the other subjects of Production Engineering 8th Sem, visit Production 8th Sem subject syllabuses for 2019 regulation.
For all Production Engineering results, visit Anna University Production all semester results direct link.