MEMS and Nanotechnology detailed syllabus for Production Engineering (Production) for 2021 regulation curriculum has been taken from the Anna Universities official website and presented for the Production students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Production Engineering 5th Sem scheme and its subjects, do visit Production 5th Sem 2021 regulation scheme. For Professional Elective-III scheme and its subjects refer to Production Professional Elective-III syllabus scheme. The detailed syllabus of mems and nanotechnology is as follows.
Course Objectives:
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Unit I
EFFECT OF MINIATURISATION AND MATERIALS FOR MEMS 9 Definition – historical development – fundamentals – Scaling laws in miniaturization – Rigid Body dynamics, Electrostatic Forces, Electromagnetic properties, Electricity, diffusion property, optical property and Heat Transfer, Materials for MEMS and Microsystems – Si, Si compounds, Si Piezo resistors, GaAs, Quartz, Piezoelectric Crystals and Polymers -Doping of semiconductors-diffusion process
Unit II
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Unit III
MICROSYSTEM-WORKING PRINCIPLE AND PACKAGING 9 Microsensors-Optical,Pressure,AcousticwaveandThermalsensors-Microactuation-thermal forces, shape memory alloys, piezoelectric crystals and Electrostatic Forces – MEMS with micro actuators – Micro gripper, Micro motor, micro valves and micro pumps – Micro accelerometers – Micro fluidics – micro mirror array for video projection – Micro system packaging – die level, device level and system level – Interfaces – Die preparation – surface bonding- wire bonding – sealing – Assembly of Microsystems-selection of packaging materials -signal mapping and transduction- pressure sensors packaging.
Unit IV
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Unit V
NANOTECHNOLOGY 9 Classification of nano structures – effect of the nanometer length scale effects of nano scale dimensions on various properties structural, thermal, chemical, mechanical, magnetic, optical and electronic properties -Fabrication methods – Top-down processes – bottom-up processes – nano positioning systems.
Course Outcomes:
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Text Books:
- Mahalik N P, MEMS, McGraw Hill (India), 2017.
- Tai-Ran Hsu, MEMS and Microsystems Design and Manufacture, 1st edition, Tata-McGrawHill, New Delhi, 2017.
Reference Books:
- Ananthasuresh G.K, Vinoy K. J, Gopalakrishnan. S, Bhat K. N and Aatre V.K., Micro and smart systems, Wiley India Pvt. Ltd., New Delhi, 2010.
- Charles P Poole, Frank J Owens, Introduction to Nano Technology, John Wiley and Sons, 2003.
- Julian W. Hardner, Micro Sensors, Principles and Applications, CRC Press, 1994.
- Marc Madou, Fundamentals of Micro fabrication, CRC Press, New York, 2011.
For detailed syllabus of all the other subjects of Production Engineering 5th Sem, visit Production 5th Sem subject syllabuses for 2021 regulation.
For all Production Engineering results, visit Anna University Production all semester results direct link.