ML5016: Thin Film Technology Syllabus for MSE 7th Sem 2019 Regulation Anna University (Professional Elective-V)

Thin Film Technology detailed syllabus for Materials Science & Engineering (MSE) for 2019 regulation curriculum has been taken from the Anna Universities official website and presented for the MSE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.

For Materials Science & Engineering 7th Sem scheme and its subjects, do visit MSE 7th Sem 2019 regulation scheme. For Professional Elective-V scheme and its subjects refer to MSE Professional Elective-V syllabus scheme. The detailed syllabus of thin film technology is as follows.

Course Objective:

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Unit I

Basics of Thin Films
Cosine law of emission.Emission from a point source.Mass of material condensing on the substrate. Chemical methods: Qualitative study of preparation of thin films by Electroplating, vapour phase growth and anodization. Physical methods: Vacuum evaporation

Unit II

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Unit III

Deposition Monitoring and Control
Microbalance, Crystal oscillator thickness monitor, optical monitor, Resistance Monitor. Thickness measurement: Multiple Beam Interferometer, Fizeau (Tolansky) technique – Fringes of equal chromatic order (FECO) method – Ellipsometry (qualitative only).

Unit IV

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Unit V

Application of Thin Films
Thin film resistors: Materials and Design of thin film resistors (Choice of resistor and shape and area) – Trimming of thin film resistors – sheet resistance control – Individual resistor trimming. Thin film capacitors: Materials – Capacitor structures – Capacitor yield and capacitor stability. Thin film field effect transistors: Fabrication and characteristics – Thin film diodes.

Course Outcome:

For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier.
.

Text Books:

1. Goswami A, “Thin Film Fundamentals”, New Age International (P) Ltd., 1996.
2. K.L. Chopra, “Thin Film Phenomena”, McGraw-Hill,1983

References:

1. AichaElshabini-Riadaud Fred D Barlow III, “Thin Film Technology Hand book”, Mc Graw Hill Company, 1997.
2. Anders H, “Thin Films in Optics”, Focal press, 1967.
3. Guthrie A, “Vacuum Technology”, John Wiley and Sons, 1963.
4. Maissel L.I and Glang R, “Hand Book of Thin Film Technology”, McGraw Hill, 1970.
5. Rao V V, Ghosh, T.B., Chopra, K.L., “Vacuum Science and Technology”, Allied Publications, 1998
6. Schwartz B and Schwartz N, “Measurement Techniques for Thin Films”, John Wiley and Sons, 1967.

For detailed syllabus of all the other subjects of Materials Science & Engineering 7th Sem, visit MSE 7th Sem subject syllabuses for 2019 regulation.

For all Materials Science & Engineering results, visit Anna University MSE all semester results direct link.