Micro Electro Mechanical Systems Mechatronics 8th Sem Syllabus for BE 2017 Regulation Anna Univ (Professional Elective IV) detail syllabus for Mechatronics Engineering (Mechatronics), 2017 regulation is collected from the Anna Univ official website and presented for students of Anna University. The details of the course are: course code (EE8091), Category (PE), Contact Periods/week (3), Teaching hours/week (3), Practical Hours/week (0). The total course credits are given in combined syllabus.
For all other mechatronics 8th sem syllabus for be 2017 regulation anna univ you can visit Mechatronics 8th Sem syllabus for BE 2017 regulation Anna Univ Subjects. For all other Professional Elective IV subjects do refer to Professional Elective IV. The detail syllabus for micro electro mechanical systems is as follows.
Course Objective:
- To provide knowledge of semiconductors and solid mechanics to fabricate MEMS devices.
- To educate on the rudiments of Micro fabrication techniques.
- To introduce various sensors and actuators
- To introduce different materials used for MEMS
- To educate on the applications of MEMS to disciplines beyond Electrical and Mechanical engineering.
Unit I
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Unit II
Sensors and Actuators-I
Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors – Thermal Sensing and Actuation
– Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph – Applications -Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators-Actuation using Shape Memory Alloys
Unit III
Sensors and Actuators-II
Piezoresistive sensors – Piezoresistive sensor materials – Stress analysis of mechanical elements
– Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators
– piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.
Unit IV
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Unit V
Polymer and Optical Mems
Polymers in MEMS- Polimide – SU-8 – Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene
– Fluorocarbon – Application to Acceleration, Pressure, Flow and Tactile sensors- Optical MEMS -Lenses and Mirrors – Actuators for Active Optical MEMS.
Course Outcome:
- Ability to understand and apply basic science, circuit theory, Electro-magnetic field theory control theory and apply them to electrical engineering problems.
- Ability to understand and analyse, linear and digital electronic circuits.
Text Books:
- Chang Liu, “Foundations of MEMS”, Pearson Education Inc., 2006.
- Stephen D Senturia, “Microsystem Design”, Springer Publication, 2000.
- Tai Ran Hsu, MEMS and Micro systems Design and Manufacture Tata McGraw Hill, New Delhi, 2002.
References:
- James J.Allen, “Micro Electro Mechanical System Design”, CRC Press Publisher, 2010
- Julian w. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, “Micro Sensors MEMS and Smart Devices”, John Wiley and Son LTD,2002
- Mohamed Gad-el-Hak, editor, The MEMS Handbook, CRC press Baco Raton, 2000
- Nadim Maluf, An Introduction to Micro Electro Mechanical System Design, Artech House, 2000.
- Thomas M.Adams and Richard A.Layton, Introduction MEMS, Fabrication and Application, Springer 2012.
For detail syllabus of all other subjects of BE Mechatronics, 2017 regulation do visit Mechatronics 8th Sem syllabus for 2017 Regulation.
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