Micro Electro Mechanical Systems detailed syllabus for Robotics & Automation Engineering (Robotics) for 2021 regulation curriculum has been taken from the Anna Universities official website and presented for the Robotics students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Robotics & Automation Engineering 6th Sem scheme and its subjects, do visit Robotics 6th Sem 2021 regulation scheme. For Professional Elective-VII scheme and its subjects refer to Robotics Professional Elective-VII syllabus scheme. The detailed syllabus of micro electro mechanical systems is as follows.
Course Objectives:
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Unit I
INTRODUCTION 9
Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators -Introduction to Micro fabrication – Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices -Polymers in MEMS- Polyamide – SU-8 – Liquid Crystal Polymer (LCP) – PDMS – PMMA -Parylene – Fluorocarbon.
Unit II
SENSORS 9
Characteristics of sensors – Electrostatic sensors – Parallel plate capacitors – Piezoresistive sensors – Piezoresistive sensor materials – Stress and strain analysis – Flexural beam bending – Torsional deflection- Applications to Inertia, Pressure, Tactile and Flow sensors -Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials
Unit III
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Unit IV
MICROMACHINING 9
Silicon Anisotropic Etching – Anisotropic Wet Etching – Dry Etching of Silicon – Plasma Etching- Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants -Case studies – Basic surface micro machining processes – Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antirestriction methods – LIGA Process -Assembly of 3D MEMS – Foundry process
Unit V
APPLICATIONS OF MEMS INERTIAL SENSORS 9
Application to Acceleration, Inertia, Acoustic, Tactile, Pressure, Flow and Tactile sensors-Optical MEMS -Lenses and Mirrors -Actuators for Active Optical MEMS.- RF MEMS and Microfluidics.
Course Outcomes:
Upon successful completion of the course, students should be able to:
- Recognize MEMS Energy Domains and Transducers, Sensors and Actuators.
- Select the Various MEMS sensors and its Stress and strain
- Apply various MEMS actuators in Real time system.
- Demonstrate various micro machining processes, Structural and Sacrificial Materials
- Analyze the various MEMS inertial, tactile, pressure and flow sensors in real time system
Text Books:
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Reference Books:
- James J.Allen, “Micro Electro Mechanical System Design”, CRC Press Publisher, 2010
- Julian w. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, “Micro Sensors MEMS and Smart Devices”, John Wiley & Son LTD,2002
- Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2000
- Nadim Maluf,“ An Introduction to Micro Electro Mechanical System Design”, Artech House, 2000.
- Thomas M.Adams and Richard A.Layton, “Introduction MEMS, Fabrication and Application,” Springer 201
For detailed syllabus of all the other subjects of Robotics & Automation Engineering 6th Sem, visit Robotics 6th Sem subject syllabuses for 2021 regulation.
For all Robotics & Automation Engineering results, visit Anna University Robotics all semester results direct link.