Semiconductor Manufacturing detailed syllabus for Electronics & Instrumentation Engineering (EIE) for 2021 regulation curriculum has been taken from the Anna Universities official website and presented for the EIE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Electronics & Instrumentation Engineering 6th Sem scheme and its subjects, do visit EIE 6th Sem 2021 regulation scheme. For Professional Elective-VI scheme and its subjects refer to EIE Professional Elective-VI syllabus scheme. The detailed syllabus of semiconductor manufacturing is as follows.
Course Objectives:
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Unit I
INTRODUCTION TO SEMICONDUCTOR MANUFACTURING
Historical perspective, processing overview, semiconductor materials, semiconductor devices, process technology, fabrication steps.
Unit II
MANUFACTURING PROCESS: CRYSTAL GROWTH, SILICON OXIDATION, PHOTOLITHOGRAPHY
Silicon crystal growth, material characterization, thermal oxidation process, impurity redistribution, masking properties of silicon dioxide, oxidation thickness characteristics.
Unit III
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Unit IV
PROCESS INTEGRATION
Passive components, bipolar technology, MOSFET Technology, MESFET Technology, MEMS Technology.
Unit V
IC MANUFACTURING
Electrical testing, packing, statistical process control, computer integrated manufacturing, challenges for integration, system-on-a-chip.
Skill Development Activities
(Group Seminar/Mini Project/Assignment/Content Preparation / Quiz/ Surprise Test / Solving GATE questions/ etc)
- Interpretation of Data Sheet of transistors and ICs with respect to their Static and Dynamic Characteristics.
- Familiarization of any one relevant software tool (MATLAB/ SCILAB/ LABVIEW/ Proteus/ Equivalent open source software)
- Design and verification of simple signal conditioning circuit through simulation
- Realization of signal conditioning circuit in hardware
- Introduction to other advanced logic circuits not covered in the above syllabus
Course Outcomes:
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Text Books:
- G. S. May and S. M. Sze, Fundamentals of Semiconductor Fabrication, Wiley India, 2004.
- Hong Xiao, Introduction to Semiconductor Manufacturing Technology – Second Edition, SPIE Press, 2012.
Reference Books:
- W. R. Runyan and K. E. Bean, Semiconductor Integrated Circuit Processing Technology, Addison Wesley Publishing Company, 1990
- S. A. Campbell, The Science and Engineering of Microelectronic Fabrication, Oxford University Press, 1996.
- M. J. Madou, Fundamentals of Micro fabrication, 2nd Edition, CRC Press, 2011.
- S. M. Sze, Semiconductor Devices: Physics and Technology, 2nd Ed., Wiley India, 2011
List of Open Source Software/ Learning Website:
- https://nptel.ac.in/courses/108106181
- https://nptel.ac.in/courses/117102061
- https://www.hitachi-hightech.com/global/products/device/semiconductor/process.html
- https://nptel.ac.in/courses/108108112
- https://www.semiconductors.org/turning-the-tide-for-semiconductor-manufacturing-in-the-u-s/
For detailed syllabus of all the other subjects of Electronics & Instrumentation Engineering 6th Sem, visit EIE 6th Sem subject syllabuses for 2021 regulation.
For all Electronics & Instrumentation Engineering results, visit Anna University EIE all semester results direct link.