OMT751: MEMS and NEMS Syllabus for Industrial 7th Sem 2019 Regulation Anna University (Open Elective-II)

MEMS and NEMS detailed syllabus for Industrial Engineering (Industrial) for 2019 regulation curriculum has been taken from the Anna Universities official website and presented for the Industrial students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.

For Industrial Engineering 7th Sem scheme and its subjects, do visit Industrial 7th Sem 2019 regulation scheme. For Open Elective-II scheme and its subjects refer to Industrial Open Elective-II syllabus scheme. The detailed syllabus of mems and nems is as follows.

Course Objective:

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Unit I

Introduction
Fundamentals – Micro systems and microelectronics – working principle of microsystems – Micro sensors, acoustic sensor, Bio sensor, chemical sensor, pressure sensor, Temperature sensor -micro actuation techniques – Actuation using thermal forces, actuation using SMA, Actuation using piezo electric effect, Actuation using electro static forces – micro gripper – micro motors – micro valves – micro pumps, types – micro heat pipes.

Unit II

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Unit III

Mechanics for Micro System Design and Applications
Basic concepts – Bending of thin plates – Mechanical vibration – Thermo mechanics – Fracture mechanics – Fluid mechanics at micro systems- Design considerations – Process design-mask layout design – Mechanical design-Applications of micro system in automotive industry, bio medical, aerospace and telecommunications.

Unit IV

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Unit V

Architecture and Applications
Architecture of MEMS – Requirements of nano systems – Development of nano electronics and structuring – Application of NEMS – Deposition of coatings – Three dimensional materials -Dewatering.

Course Outcome:

For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier.
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Text Books:

1. Goser.K , Dienstuhl .J , Nano Electronics and Nanosystems , Springer International Edition, 2008.
2. Michael Pycraft Inrushes , Nano Electro Mechanics in Engineering and biology ,CRC press New York, 2002.
3. Tai – Ran Hsu,MEMS and Microsystems: Design and Manufacture , second edition Tata Mc Graw Hill, 2008.

References:

1. Charles P.Poojlejr Fran K J.Owners , Introduction to Nano Technology , Willey student Edition 2008.
2. Gregory Timp, Nano Technology ,Spinger International Edition , 1999.
3. Julian W.Gardner,Vijay K.Varadan,Osama O.Awadel Karim, Microsensors MEMS and Smart Devices, John Wiby and sons Ltd.,2001.
4. Mohamed Gad – el- Hak,The MEMS HAND book,CRC press 2005

For detailed syllabus of all the other subjects of Industrial Engineering 7th Sem, visit Industrial 7th Sem subject syllabuses for 2019 regulation.

For all Industrial Engineering results, visit Anna University Industrial all semester results direct link.