MEMS and NEMS detailed syllabus for Information Technology (IT) for 2019 regulation curriculum has been taken from the Anna Universities official website and presented for the IT students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Information Technology 7th Sem scheme and its subjects, do visit IT 7th Sem 2019 regulation scheme. For Open Elective-II scheme and its subjects refer to IT Open Elective-II syllabus scheme. The detailed syllabus of mems and nems is as follows.
Course Objective:
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Unit I
Introduction To Mems and Nems
Introduction to Design of MEMS and NEMS, Overview of Nano and Microelectromechanical Systems, Applications of Micro and Nanoelectromechanical systems, Materials for MEMS and NEMS: Silicon, silicon compounds, polymers, metals.
Unit II
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Unit III
Micro Sensors
MEMS Sensors: Design of Acoustic wave sensors, Vibratory gyroscope, Capacitive Pressure sensors, Case study: Piezoelectric energy harvester
Unit IV
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Unit V
Nano Devices
Atomic Structures and Quantum Mechanics, Shrodinger Equation, ZnO nanorods based NEMS device: Gas sensor.
Course Outcome:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
References:
- Marc Madou, Fundamentals of Microfabrication, CRC press 1997.
- Stephen D. Senturia, Micro system Design, Kluwer Academic Publishers,2001
- Tai Ran Hsu ,MEMS and Microsystems Design and Manufacture ,Tata Mcraw Hill, 2002.
- Chang Liu, Foundations of MEMS, Pearson education India limited, 2006,
- Sergey Edward Lyshevski, MEMS and NEMS: Systems, Devices, and Structures CRC Press, 2002
For detailed syllabus of all the other subjects of Information Technology 7th Sem, visit IT 7th Sem subject syllabuses for 2019 regulation.
For all Information Technology results, visit Anna University IT all semester results direct link.