MEMS and Micro Fabrication detailed syllabus for Materials Science & Engineering (MSE) for 2019 regulation curriculum has been taken from the Anna Universities official website and presented for the MSE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Materials Science & Engineering 6th Sem scheme and its subjects, do visit MSE 6th Sem 2019 regulation scheme. For Professional Elective-III scheme and its subjects refer to MSE Professional Elective-III syllabus scheme. The detailed syllabus of mems and micro fabrication is as follows.
Course Objective:
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Unit I
Material Aspects of Mems and Nems
Overview of MEMS and NEMS. Material Aspects – Silicon and its compounds – Thin metal films – semiconductor – optical properties – Polymers – Smart materials.
Unit II
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Unit III
Micromanufacturing Processes
Thin films – Physical deposition: Evaporation and sputtering – Chemical Vapor Deposition -Epitaxial growth. Etching – Isotropic etching – Anisotropic etching – Deep Reactive ion etching (DRIE). Surface micromachining, Bulk Micro-manufacturing, LIGA Process.
Unit IV
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Unit V
Mems and Nems Applications
Applications in Computer industry – Making of ICs and Microprocessors – Data storage devices. Automobile – Safety and Stability Control. Health care – Lab-on-a-Chip. Consumer Products; Micro reactor; Micro-bots; MOEMS; Molecular machines.
Course Outcome:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
Text Books:
- Stephen A.Campbell, “Fabrication Engineering at the micro and nano scale”, Oxford University Press, 4th edition, 2013.
- Tai-Ran Hsu, “MEMS and Micro systems Design and Manufacture”, McGraw Hill Education, 2015.
References:
- Bharat Bhushan, “Handbook of Nanotechnology”, Springer, 2006.
- Maria Stepanova and Stephen Dew, “Nanofabrication: Techniques and Principles”, Springer, 2011.
- Marc Madou, “Fundamentals of Microfabrication”, CRC Press, 2002.
- Mark A. Ratner and Daniel Ratner, “Nanotechnology: A Gentle Introduction to the Next Big Idea, Pearson, 2003.
- Stephen D Senturia, “Microsystem Design”, Kluwer Academic Publishers, 2002.
For detailed syllabus of all the other subjects of Materials Science & Engineering 6th Sem, visit MSE 6th Sem subject syllabuses for 2019 regulation.
For all Materials Science & Engineering results, visit Anna University MSE all semester results direct link.