Micro and Nano Fabrication detailed syllabus for Materials Science & Engineering (MSE) for 2021 regulation curriculum has been taken from the Anna Universities official website and presented for the MSE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Materials Science & Engineering 5th Sem scheme and its subjects, do visit MSE 5th Sem 2021 regulation scheme. For Professional Elective-III scheme and its subjects refer to MSE Professional Elective-III syllabus scheme. The detailed syllabus of micro and nano fabrication is as follows.
Course Objectives:
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Unit I
INTRODUCTION 9
Review of early developments in Microfabrication Process Engineering, Introduction to Material Science for device fabrication
Unit II
MANUFACTURING PROCESSES 9
Hot Processing and Ion implantation – Diffusion, Thermal Oxidation, Ion implantation, Rapid Thermal Processing. Pattern Transfer
Unit III
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Unit IV
THIN FILM DEPOSITION TECHNIQUES 9
Thin film deposition – Physical deposition: Evaporation and sputtering – Chemical Vapour Deposition – Epitaxial growth. Surface Micromachining of silicon
Unit V
MICROMANUFACTURING PROCESSES 9
Etching – Isotropic etching – Anisotropic etching – Deep Reactive ion etching (DRIE). Surface micromachining, Bulk Micro-manufacturing, LIGA Process. Scaling laws and their influences on process and design selection
Course Outcomes:
Upon completion of this course, the students will be able to:
- Select suitable material for MEMS and Microsystems, and explain the scaling laws involved in miniaturization.
- Explain the various micro-manufacturing processes.
- Discuss on the various lithography techniques
- Describe the working principles of various thin film deposition techniques
- Explain the method of etching, surface and bulk micro manufacturing methods
Text Books:
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Reference Books:
- Bharat Bhushan, “Handbook of Nanotechnology”, Springer, 2006.
- Marc Madou, “Fundamentals of Microfabrication”, CRC Press, 2002
- Stephen D Senturia, “Microsystem Design”, Kluwer Academic Publishers, 2002.
For detailed syllabus of all the other subjects of Materials Science & Engineering 5th Sem, visit MSE 5th Sem subject syllabuses for 2021 regulation.
For all Materials Science & Engineering results, visit Anna University MSE all semester results direct link.