MEMS and Nanotechnology detailed syllabus for Materials Science & Engineering (MSE) for 2021 regulation curriculum has been taken from the Anna Universities official website and presented for the MSE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Materials Science & Engineering 5th Sem scheme and its subjects, do visit MSE 5th Sem 2021 regulation scheme. For Professional Elective-III scheme and its subjects refer to MSE Professional Elective-III syllabus scheme. The detailed syllabus of mems and nanotechnology is as follows.
Course Objectives:
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Unit I
MATERIAL ASPECTS OF MEMS AND NEMS 9
Overview of MEMS and NEMS. Material Aspects – Silicon and its compounds – Thin metal films -semiconductor – optical properties – Polymers – Smart materials.
Unit II
SENSORS 9
MEMS Sensors- Mechanical Sensors- Thermal Sensors- Magnetic Sensors – Micro-opto electromechanical Systems – Radio Frequency (RF) MEMS. Microfluidic Systems; Chemical and Biomedical Microsystems.
Unit III
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Unit IV
MEMS AND NEMS APPLICATIONS – I 9
Applications in Computer industry – Making of ICs and Microprocessors – Data storage devices. Automobile – Safety and Stability Control. Health care
Unit V
MEMS AND NEMS APPLICATIONS – II 9
Lab-on-a-Chip. Consumer Products; Micro reactor; Micro-bots; MOEMS; Molecular machines. Applications of NEMS
Course Outcomes:
Upon completion of this course, the students will be able to:
- Select suitable material for MEMS and Microsystems,
- Explain the scaling laws involved in miniaturization.
- Apply the working principle of electrostatic based MEMS sensors and actuators in the design of MEMS devices.
- Apply the working principle of thermal based MEMS sensors and actuators in the design of MEMS devices.
- Design the elements of Micro-fluidic systems, and select suitable MEMS devices for Industrial applications.
Text Books:
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Reference Books:
- Bharat Bhushan, “Handbook of Nanotechnology”, Springer, 2006.
- Marc Madou, “Fundamentals of Microfabrication”, CRC Press, 2002.
- Stephen D Senturia, “Microsystem Design”, Kluwer Academic Publishers, 2002.
For detailed syllabus of all the other subjects of Materials Science & Engineering 5th Sem, visit MSE 5th Sem subject syllabuses for 2021 regulation.
For all Materials Science & Engineering results, visit Anna University MSE all semester results direct link.