Thin Film Technology detailed syllabus for Materials Science & Engineering (MSE) for 2021 regulation curriculum has been taken from the Anna Universities official website and presented for the MSE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Materials Science & Engineering 5th Sem scheme and its subjects, do visit MSE 5th Sem 2021 regulation scheme. For Professional Elective-III scheme and its subjects refer to MSE Professional Elective-III syllabus scheme. The detailed syllabus of thin film technology is as follows.
Course Objectives:
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Unit I
BASICS OF THIN FILMS 9
Cosine law of emission.Emission from a point source.Mass of material condensing on the substrate. Chemical methods: Qualitative study of preparation of thin films by Electroplating, vapour phase growth and anodization. Physical methods: Vacuum evaporation
Unit II
PREPARATION OF THIN FILMS 9
Study of thin film vacuum coating unit – Construction and uses of vapour sources-wire, sublimation, crucible and electron bombardment heated sources. Arc and Laser evaporation. Sputtering – Study of glow Discharge – Physical nature of sputtering – Sputtering yield- Experimental set up for DC sputtering, AC sputtering and RF sputtering. Nucleation and growth of thin films (qualitative study only): Four stages of film growth.
Unit III
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Unit IV
PROPERTIES OF THIN FILM 9
Sheet resistance – size effect – Electrical conduction in thin metallic films.Effect of Ageing and Annealing – Oxidation – agglomeration. Dielectric properties: DC conduction mechanism – Low field and high field conduction. Breakdown mechanism in dielectric films – AC conduction mechanism. Temperature dependence of conductivity. Optical properties: Optical constants and their determination – Spectrophotometer method. Anti-reflection coatings. Interference filters. Thin film Solar Cells CuInSe2 solar cell.
Unit V
APPLICATION OF THIN FILMS 9
Thin film resistors: Materials and Design of thin film resistors (Choice of resistor and shape and area) – Trimming of thin film resistors – sheet resistance control – Individual resistor trimming. Thin film capacitors: Materials – Capacitor structures – Capacitor yield and capacitor stability. Thin film field effect transistors: Fabrication and characteristics – Thin film diodes.
Course Outcomes:
Upon completion of the course, the students will be able to
- Explain the fundamental principles of Thin film technology.
- Compare the various techniques of preparation of thin films with respect to the processes, advantages, limitations and applications.
- Interpret the results obtained from Microbalance, Crystal oscillator thickness monitor, optical monitor, Resistance Monitor and Thickness measurements.
- Interpret the effect of size of thin films and ageing and annealing on the optical and conductive properties of thin films.
- Identify suitable surface modification technologies of deposition of thin film for different application like optical emission, abrasion resistance, dielectric, electronic applications, energy conversion, etc.
Text Books:
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Reference Books:
- AichaElshabini-Riadaud Fred D Barlow III, “Thin Film Technology Hand book”, Mc Graw Hill Company, 1997.
- Anders H, “Thin Films in Optics”, Focal press, 1967.
- Guthrie A, “Vacuum Technology”, John Wiley and Sons, 1963.
- Maissel L.I and Glang R, “Hand Book of Thin Film Technology”, McGraw Hill, 1970.
- Rao V V, Ghosh, T.B., Chopra, K.L., “Vacuum Science and Technology”, Allied Publications, 1998
- Schwartz B and Schwartz N, “Measurement Techniques for Thin Films”, John Wiley & Sons, 1967.
For detailed syllabus of all the other subjects of Materials Science & Engineering 5th Sem, visit MSE 5th Sem subject syllabuses for 2021 regulation.
For all Materials Science & Engineering results, visit Anna University MSE all semester results direct link.