Micro Electro Mechanical Systems Robotics & Automation 8th Sem Syllabus for BE 2017 Regulation Anna Univ (Professional Elective V) detail syllabus for Robotics And Automation Engineering (Robotics & Automation), 2017 regulation is collected from the Anna Univ official website and presented for students of Anna University. The details of the course are: course code (EE8091), Category (PE), Contact Periods/week (3), Teaching hours/week (3), Practical Hours/week (0). The total course credits are given in combined syllabus.
For all other robotics & automation 8th sem syllabus for be 2017 regulation anna univ you can visit Robotics & Automation 8th Sem syllabus for BE 2017 regulation Anna Univ Subjects. For all other Professional Elective V subjects do refer to Professional Elective V. The detail syllabus for micro electro mechanical systems is as follows.
Course Objective:
- To provide knowledge of semiconductors and solid mechanics to fabricate MEMS devices.
- To educate on the rudiments of Micro fabrication techniques.
- To introduce various sensors and actuators
- To introduce different materials used for MEMS
- To educate on the applications of MEMS to disciplines beyond Electrical and Mechanical engineering.
Unit I
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Unit II
Sensors and Actuators-I
Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors – Thermal Sensing and Actuation
– Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph – Applications -Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators-Actuation using Shape Memory Alloys
Unit III
Sensors and Actuators-II
Piezoresistive sensors – Piezoresistive sensor materials – Stress analysis of mechanical elements
– Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators
– piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.
Unit IV
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Unit V
Polymer and Optical Mems
Polymers in MEMS- Polimide – SU-8 – Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene
– Fluorocarbon – Application to Acceleration, Pressure, Flow and Tactile sensors- Optical MEMS -Lenses and Mirrors – Actuators for Active Optical MEMS.
Course Outcome:
- Ability to understand and apply basic science, circuit theory, Electro-magnetic field theory control theory and apply them to electrical engineering problems.
- Ability to understand and analyse, linear and digital electronic circuits.
Text Books:
- Chang Liu, “Foundations of MEMS”, Pearson Education Inc., 2006.
- Stephen D Senturia, “Microsystem Design”, Springer Publication, 2000.
- Tai Ran Hsu, MEMS and Micro systems Design and Manufacture Tata McGraw Hill, New Delhi, 2002.
References:
- James J.Allen, “Micro Electro Mechanical System Design”, CRC Press Publisher, 2010
- Julian w. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, “Micro Sensors MEMS and Smart Devices”, John Wiley and Son LTD,2002
- Mohamed Gad-el-Hak, editor, The MEMS Handbook, CRC press Baco Raton, 2000
- Nadim Maluf, An Introduction to Micro Electro Mechanical System Design, Artech House, 2000.
- Thomas M.Adams and Richard A.Layton, Introduction MEMS, Fabrication and Application, Springer 2012.
For detail syllabus of all other subjects of BE Robotics & Automation, 2017 regulation do visit Robotics & Automation 8th Sem syllabus for 2017 Regulation.
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