Micro Electro Mechanical Systems E&TC 6th Sem Syllabus for BE 2017 Regulation Anna Univ (Professional Elective II) detail syllabus for Electronics & Communication Engineering (E&Tc), 2017 regulation is collected from the Anna Univ official website and presented for students of Anna University. The details of the course are: course code (TL8005), Category (PE), Contact Periods/week (3), Teaching hours/week (3), Practical Hours/week (0). The total course credits are given in combined syllabus.
For all other e&tc 6th sem syllabus for be 2017 regulation anna univ you can visit E&TC 6th Sem syllabus for BE 2017 regulation Anna Univ Subjects. For all other Professional Elective II subjects do refer to Professional Elective II. The detail syllabus for micro electro mechanical systems is as follows.
Course Objective:
- To educate on the rudiments of micro fabrication techniques.
- To introduce various sensors and actuators.
- To introduce different materials used for MEMS.
- To educate on the application of MEMS to disciplines beyond Electrical and Mechanical engineering.
- To understand about the concept of MEMS switching capacitor
Unit I
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Unit II
Mems Materials
Metal and metal alloys – Semiconductors, polymers, ceramic materials, composite materials -Piezo resistance – Piezo electricity – Pyro electricity – Properties of thin films.
Unit III
Microelectronic Technology for Mems – I
MEMS and IC fabrication cycle: Silicon wafer fabrication – Crystal growth -Monolithic Processing-Monolithic mounting-Evaporation – Types – Spin casting – Oxidation of silicon – Dry,Wet.
Unit IV
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Unit V
Mems Switch Design
RF MEMS switches: Introduction – Switch parameters – Basics of switching – Application areas of RF MEMS – Electrostatic switching -MEMS switched capacitors- Voltage switches -Reconfigurable MEMS networks, antennas.
Course Outcome:
After studying this course, the student would be able to:
- Analyze the operation of micro devices, micro systems and their applications.
- Design the micro devices, micro system using the MEMS fabrication process.
- Understand the necessity of MEMS in thrust areas like sensors and actuators..
- Understand the principles of energy transduction, sensing and actuation on a microscopic scale.
- Design the principles of micro fabrication to the development of micro mechanical devices.
Text Books:
- Julian Gardner Vijay Vardan K Osama O A Microsensors, MEMS and Smart Devices John wiley and sons 2002. (unit-1&2)
- Tai Ran Hsu Mems and Microsystems Design Tata McGraw-Hill 2002. (unit-3,4&5)
References:
- Fukuda T Menz W Micro Mechanical Systems Principles and Technology Elsevier 2002
- Rai Choudary P MEMS and MOEMS Technology and Applications SPIE Press 2000
- Gabriel M RebeizRF MEMS theory,Design and Technology John wiley and sons 2003
- Vijay vardan K Vinoy K J Jose KARF MEMS and their Applications John wiley and sons 2003
For detail syllabus of all other subjects of BE E&Tc, 2017 regulation do visit E&Tc 6th Sem syllabus for 2017 Regulation.
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