Mems and Nems Robotics & Automation 7th Sem Syllabus for BE 2017 Regulation Anna Univ (Open Elective II) detail syllabus for Robotics And Automation Engineering (Robotics & Automation), 2017 regulation is collected from the Anna Univ official website and presented for students of Anna University. The details of the course are: course code (OMT751), Category (OE), Contact Periods/week (3), Teaching hours/week (3), Practical Hours/week (0). The total course credits are given in combined syllabus.
For all other robotics & automation 7th sem syllabus for be 2017 regulation anna univ you can visit Robotics & Automation 7th Sem syllabus for BE 2017 regulation Anna Univ Subjects. For all other Open Elective II subjects do refer to Open Elective II. The detail syllabus for mems and nems is as follows.
Course Objective:
- To develop the basic knowledge about the MEMS system and to know about the concepts and principles of MEMS and NEMS with various applications.
Unit I
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Unit II
Micro Fabrication and Manufacturing Techniques
Materials for micro systems – Substrates and wafer- Silicon, Quartz, Piezoelectric crystals, polymers – Photo Lithography – Diffusion- Oxidation – CVD- PVD, Etching, types – Bulk micro manufacturing – Surface micro machining – Micro system packaging-materials, die level, device level, system level – Packaging techniques – die preparation – Surface bonding-wire bonding -sealing.
Unit III
Mechanics for Micro System Design and Applications
Basic concepts – Bending of thin plates – Mechanical vibration – Thermo mechanics – Fracture mechanics – Fluid mechanics at micro systems- Design considerations – Process design-mask layout design – Mechanical design-Applications of micro system in automotive industry, bio medical, aerospace and telecommunications.
Unit IV
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Unit V
Architecture and Applications
Architecture of MEMS – Requirements of nano systems – Development of nano electronics and structuring – Application of NEMS – Deposition of coatings – Three dimensional materials -Dewatering.
Course Outcome:
- CO1 Understand the Fundamentals and working principles of microsystems and microelectronics
- CO2 Knowledge on both micro fabrication and manufacturing techniques
- CO3 Acquiring knowledge about micro system design and its various applications
- CO4 Study about the basic concepts of Nano electronics with various devices and also discusses with its applications
- CO5 Realizing the various application of NEMS and Architecture of MEMS
Text Books:
- Goser.K , Dienstuhl .J , Nano Electronics and Nanosystems , Springer International Edition, 2008.
- Michael Pycraft Inrushes , Nano Electro Mechanics in Engineering and biology ,CRC press New York, 2002.
- Tai – Ran Hsu,MEMS and Microsystems: Design and Manufacture , second edition Tata Mc Graw Hill, 2008.
References:
- Charles P.Poojlejr Fran K J.Owners , Introduction to Nano Technology , Willey student Edition 2008.
- Gregory Timp, Nano Technology ,Spinger International Edition , 1999.
- Julian W.Gardner,Vijay K.Varadan,Osama O.Awadel Karim, Microsensors MEMS and Smart Devices, John Wiby and sons Ltd.,2001.
- Mohamed Gad – el- Hak,The MEMS HAND book, CRC press 2005
For detail syllabus of all other subjects of BE Robotics & Automation, 2017 regulation do visit Robotics & Automation 7th Sem syllabus for 2017 Regulation.
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