Mems and Nems Ece 6th Sem Syllabus for BE 2017 Regulation Anna Univ (Professional Elective II) detail syllabus for Electronics And Communication Engineering (Ece), 2017 regulation is collected from the Anna Univ official website and presented for students of Anna University. The details of the course are: course code (EC8001), Category (PE), Contact Periods/week (3), Teaching hours/week (3), Practical Hours/week (0). The total course credits are given in combined syllabus.
For all other ece 6th sem syllabus for be 2017 regulation anna univ you can visit Ece 6th Sem syllabus for BE 2017 regulation Anna Univ Subjects. For all other Professional Elective II subjects do refer to Professional Elective II. The detail syllabus for mems and nems is as follows.
Course Objective:
- To introduce the concepts of micro and nano electromechanical devices
- To know the fabrication process of Microsystems
- To know the design concepts of micro sensors and micro actuators
- To introduce the concepts of quantum mechanics and nano systems
Unit I
For complete syllabus and results, class timetable and more pls download iStudy. Its a light weight, easy to use, no images, no pdfs platform to make students life easier.
Unit II
Mems Fabrication Technologies
Photolithography, Ion Implantation, Diffusion, Oxidation, CVD, Sputtering Etching techniques, Micromachining: Bulk Micromachining, Surface Micromachining, LIGA.
Unit III
Micro Sensors
MEMS Sensors: Design of Acoustic wave sensors, Vibratory gyroscope, Capacitive Pressure sensors, Case study: Piezoelectric energy harvester
Unit IV
For complete syllabus and results, class timetable and more pls download iStudy. Its a light weight, easy to use, no images, no pdfs platform to make students life easier.
Unit V
Nano Devices
Atomic Structures and Quantum Mechanics, Shrodinger Equation, ZnO nanorods based NEMS device: Gas sensor.
Course Outcome:
On successful completion of this course, the student should be able to:
- Interpret the basics of micro/nano electromechanical systems including their applications and advantages
- Recognize the use of materials in micro fabrication and describe the fabrication processes including surface micromachining, bulk micromachining and LIGA.
- Analyze the key performance aspects of electromechanical transducers including sensors and actuators
- Comprehend the theoretical foundations of quantum mechanics and Nano systems
References:
- Marc Madou, Fundamentals of Microfabrication, CRC press 1997.
- Stephen D. Senturia, Micro system Design, Kluwer Academic Publishers,2001
- Tai Ran Hsu ,MEMS and Microsystems Design and Manufacture ,Tata Mcraw Hill, 2002.
- Chang Liu, Foundations of MEMS, Pearson education India limited, 2006,
- Sergey Edward Lyshevski, MEMS and NEMS: Systems, Devices, and Structures CRC Press, 2002
For detail syllabus of all other subjects of BE Ece, 2017 regulation do visit Ece 6th Sem syllabus for 2017 Regulation.
Dont forget to download iStudy for latest syllabus and results, class timetable and more.