Mems and Nano Science Ice 6th Sem Syllabus for BE 2017 Regulation Anna Univ (Professional Elective I) detail syllabus for Instrumentation & Control Engineering (Ice), 2017 regulation is collected from the Anna Univ official website and presented for students of Anna University. The details of the course are: course code (EE8072), Category (PE), Contact Periods/week (3), Teaching hours/week (3), Practical Hours/week (0). The total course credits are given in combined syllabus.
For all other ice 6th sem syllabus for be 2017 regulation anna univ you can visit Ice 6th Sem syllabus for BE 2017 regulation Anna Univ Subjects. For all other Professional Elective I subjects do refer to Professional Elective I. The detail syllabus for mems and nano science is as follows.
Course Objective:
- To provide wide knowledge of semiconductors and solid mechanics to fabricate MEMS devices
- To educate on the rudiments of Micro fabrication techniques
- To educate on applications of MEMS
- To provide wide information dealing with nano material and its necessity
- To analyze methods involving preparation of nano scale devices
Unit I
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Unit II
Microsystem Fabrication Process
Photolithography, Ion Implantation, Diffusion, Oxidation: Thermal oxidation-Oxidation by color, Chemical Vapour Depostion, Physical Vapour Deposition: Sputtering, Etching: ChemicalPlasma, Micromaching: Bulk Micromachining – Surface Micromachining.
Unit III
Polymers and Optical Mems
Polymers in MEMS : Polimide – SU-8 – Liquid Crystal Polymer (LCP) – PDMS – PMMA –
Parylene – Fluorocarbon, Optical MEMS : Lenses and Mirrors – Actuators for Active Optical MEMS, Assembly of 3D MEMS – Foundry process.
Unit IV
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Unit V
Patterning and Preparation Methods
Bottom up Synthesis – Top down Approach : Precipitation, Mechanical Milling, Colloidal routes, Self assembly, Vapour phase deposition, Evaporation, Molecular Beam Epitaxy, Atomic Layer Epitaxy, MOMBE, Patterning : Introduction to optical/UV electron beam and X-ray Lithography systems and processes. Clean rooms: specifications and design, air and water purity, requirements for particular processes.
Course Outcome:
- Ability to understand the operation of micro devices, micro systems and their applications.
- Ability to design the micro devices, micro systems using the MEMS fabrication process.
- Ability to understand the operation of nao devices, nano systems and their applications.
- Ability to design nano devices, nano systems using the preparation methods.
Text Books:
- Tai Ran Hsu MEMS and Microsystems Design : Manufacture and Nano Scale Engineering, John Wiely and Sons, INC., 2nd Edition, 2008.
- A.S. Edelstein and R.C. Cammearata, eds., Nanomaterials: Synthesis, Properties and Applications, (Institute of Physics Publishing, Bristol and Philadelphia, 1996).
References:
- Chang Liu, Foundations of MEMS, Pearson Education Inc., 2012.
- Mohamed Gad-el-Hak, editor, The MEMS Handbook, CRC press Baco Raton, 2001.
- Nadim Maluf, An Introduction to Micro Electro Mechanical System Design, Artech House, 2000..
- G Timp (Editor), Nanotechnology, AIP press/Springer, 1999.
- N John Dinardo, Nanoscale charecterisation of surfaces and Interfaces, Second edition, Weinheim Cambridge, Wiley-VCH, 2000.
For detail syllabus of all other subjects of BE Ice, 2017 regulation do visit Ice 6th Sem syllabus for 2017 Regulation.
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