MEMS and Microsystems detailed syllabus for Mechanical Engineering (MECH) for 2019 regulation curriculum has been taken from the Anna Universities official website and presented for the MECH students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Mechanical Engineering 8th Sem scheme and its subjects, do visit MECH 8th Sem 2019 regulation scheme. For Professional Elective-VI scheme and its subjects refer to MECH Professional Elective-VI syllabus scheme. The detailed syllabus of mems and microsystems is as follows.
Course Objective:
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Unit I
Basic Engineering for Mems
History of MEMS Development, Multidisciplinary Nature of Microsystems, Energy Domains, Scaling Laws in Miniaturization, Essential Electrical and Mechanical Concepts in MEMS, Materials for MEMS and Microsystems.
Unit II
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Unit III
Electrostatic and Thermal Based Mems
Introduction to Electrostatic Sensors and Actuators, Parallel-Plate Capacitor, Application of ParallelPlate Capacitors, Interdigitated Finger Capacitors, Applications of Comb-Drive Devices, Introduction to Thermal Sensors and Actuators, Sensors and Actuators Based on Thermal Expansion, Thermocouples, Thermal Resistors, Shape Memory Alloy, Applications of Thermal Sensors and Actuators.
Unit IV
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Unit V
Microfluidics and Applications of Mems
Microfluidics – Fluid Mechanics Concepts, Design and Fabrication of Channels, Valves, Pumps, Case Studies – Accelerometer, Gyros, RF MEMS and MOEMS.
Course Outcome:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
Text Books:
- Chang Liu, “Foundations of MEMS”, Pearson Education, 2011.
- Tai-Ran Hsu, “MEMS and Microsystems: Design and Manufacture”, McGraw Hill Education, 2002.
References:
- Marc J. Madou, “Fundamentals of Microfabrication and Nanotechnology”, CRC Press, 2011.
- Mohamed Gad-el-Hak, “The MEMS handbook: MEMS Applications”, CRC press, 2006.
- NitaigourPremchandMahalik, “MEMS”, McGraw Hill Education, 2007.
- Stephen D Senturia, “Microsystem Design”, Kluwer Academic Publishers, 2001.
- Thomas M. Adams and Richard A. Layton, “Introductory MEMS: Fabrication and Applications”, Springer, 2010.
For detailed syllabus of all the other subjects of Mechanical Engineering 8th Sem, visit MECH 8th Sem subject syllabuses for 2019 regulation.
For all Mechanical Engineering results, visit Anna University MECH all semester results direct link.