Micro Electro Mechanical Systems detailed syllabus for Electrical & Electronics Engineering (EEE) for 2019 regulation curriculum has been taken from the Anna Universities official website and presented for the EEE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Electrical & Electronics Engineering 7th Sem scheme and its subjects, do visit EEE 7th Sem 2019 regulation scheme. For Professional Elective-V scheme and its subjects refer to EEE Professional Elective-V syllabus scheme. The detailed syllabus of micro electro mechanical systems is as follows.
Course Objective:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier.
.
Unit I
Introduction
Intrinsic Characteristics of Micro systems – Macro and micro Sensors and Actuators -Scaling laws -Silicon and polymer based MEMS processes and MEMS Materials
Unit II
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
Unit III
Sensors and Actuators – I
Electrostatic sensors – Parallel plate capacitors – Applications – Micro motors – Inter digitated Finger capacitor – Comb drive devices – Thermal Sensing and Actuation – Thermal expansion- Thermal couples – Thermal resistors – Applications – Microfluidics for sensing and actuation applications.
Unit IV
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
Unit V
Applications
Application to Acceleration, Pressure, Flow, Chemical, Inertial sensors – Optical MEMS – Bio MEMS -RF MEMS – Energy Harvesting – NEMS devices.
Course Outcome:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
Text Books:
- Chang Liu, “Foundations of MEMS”, Pearson Education Inc
- Tai Ran Hsu, “MEMS and Micro systems Design and Manufacture” Tata McGraw Hill, New Delhi, 2006.
- Stephen D Senturia, “Micro system Design”, Springer International Edition, 2006.
References:
- Stephen D Senturia, “Micro system Design”, Springer International Edition, 2006.
- Gregory T. Kovacs “Micro machined Transducers Source Book”, McGraw-Hill High Education, 1998.
- M.H.Bao, “Micromechanical Transducers: Pressure sensors, Accelerometers and Gyroscopes”, Elsevier, Newyork, 2000.
For detailed syllabus of all the other subjects of Electrical & Electronics Engineering 7th Sem, visit EEE 7th Sem subject syllabuses for 2019 regulation.
For all Electrical & Electronics Engineering results, visit Anna University EEE all semester results direct link.