EE3023: MEMS and NEMS syllabus for EEE 2021 regulation (Professional Elective-III)

MEMS and NEMS detailed syllabus for Electrical & Electronics Engineering (EEE) for 2021 regulation curriculum has been taken from the Anna Universities official website and presented for the EEE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.

For Electrical & Electronics Engineering 5th Sem scheme and its subjects, do visit EEE 5th Sem 2021 regulation scheme. For Professional Elective-III scheme and its subjects refer to EEE Professional Elective-III syllabus scheme. The detailed syllabus of mems and nems is as follows.

Course Objectives:

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Unit I

INTRODUCTION TO MEMS and NEMS 6 Overview of Micro electro mechanical systems and Nano Electro mechanical systems, devices and technologies, Laws of scaling- Materials for MEMS and NEMS – Applications of MEMS and NEMS.

Unit II

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Unit III

MICRO SENSORS AND MICRO ACTUATORS 6 Micromachining: Capactive Sensors- Piezoresistive Sensors- Piezoelectric actuators.

Unit IV

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Unit V

MEMS and NEMS APPLICATION 6 Bio MEMS- Optical NEMS- Micro motors- Smart Sensors – Recent trends in MEMS and NEMS.

Lab Components:

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Course Outcomes:

At the end of this course, the students will have the ability to

1. Explain the material properties and the significance of MEMS and NEMS for industrial automation.
2. Demonstrate knowledge delivery on micromachining and micro fabrication.
3. Apply the fabrication mechanism for MEMS sensor and actuators.
4. Apply the concepts of MEMS and NEMS to models ,simulate and process the sensors and actuators.
5. Improved Employability and entrepreneurship capacity due to knowledge up gradation on MEMS and NEMS technology.

Text Books:

1. Chang Liu, Foundations of MEMS, Pearson International Edition, 2011, 2nd Edition.
2. Tai-.Ran Hsu, MEMS and Microsystems: design , manufacture, and Nanoscale- 2nd Edition, John Wiley & Sons, Inc., Hoboken, New Jersey, 2008.
3. Lyshevski, S.E. Nano- and Micro-Electromechanical Systems: Fundamentals of Nano-and Microengineering (2nd ed.). CRC Press,2005.
4. Julian W Gardner and Vijay K Varadan, Microsensors, MEMS and Smart Devices, John Wiley and Sons Ltd, 2001, 1st Edition.

Reference Books:

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List of Open Source Software/ Learning Website:

1. https://www.academia.edu/Lectures_on_MEMS_and_MICROSYSTEMS_DESIGN_AND_M ANUFACTURE
2. https://nptel.ac.in/courses
3. https://www.iitk.ac.in/me/mems-fabrication
4. http://mems.iiti.ac.in/
5. https://onlinecourses.nptel.ac.in/noc22_ee36/preview

For detailed syllabus of all the other subjects of Electrical & Electronics Engineering 5th Sem, visit EEE 5th Sem subject syllabuses for 2021 regulation.

For all Electrical & Electronics Engineering results, visit Anna University EEE all semester results direct link.