MEMS detailed syllabus for Electronics & Communication Engineering (ECE) for 2019 regulation curriculum has been taken from the Anna Universities official website and presented for the ECE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Electronics & Communication Engineering 8th Sem scheme and its subjects, do visit ECE 8th Sem 2019 regulation scheme. For Professional Elective-VI scheme and its subjects refer to ECE Professional Elective-VI syllabus scheme. The detailed syllabus of mems is as follows.
Course Objective:
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Unit I
Introduction To Mems
MEMS and Microsystems, Miniaturization, Typical products, Micro sensors, Micro actuation, MEMS with micro actuators, Microaccelorometers and Micro fluidics, MEMS materials, Micro fabrication
Unit II
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Unit III
Electro Static Design and System Issues
Electrostatics: basic theory, electro static instability. Surface tension, gap and finger pull up, Electro static actuators, Comb generators, gap closers, rotary motors, inch worms, Electromagnetic actuators. bistable actuators. Electronic Interfaces, Feed back systems, Noise, Circuit and system issues.
Unit IV
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Unit V
Introduction To Optical and Rf Mems
Optical MEMS, – System design basics – Gaussian optics, matrix operations, resolution. Case studies- MEMS scanners and retinal scanning display, Digital Micro mirror devices. RF Mems -design basics, case study – Capacitive RF MEMS switch, performance issues.
Course Outcome:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
Text Books:
- Stephen Santeria,”Microsystems Design”, Springer, 2016.
- NadimMaluf,”An Introduction to Micro Electro Mechanical System Engineering, Artech House, 2004.
References:
- Ai Qun Liu,”Photonic MEMS Devices”, CRC press Bocaraton, 2009.
- Tai Ran Hsu, “MEMS and Micro Systems Design, Manufacture and Nanoscale Engineering”, John Wiley, New Jersy, 2008.
- Chang Liu, “Foundations of MEMS”, Pearson Education, 2012.
For detailed syllabus of all the other subjects of Electronics & Communication Engineering 8th Sem, visit ECE 8th Sem subject syllabuses for 2019 regulation.
For all Electronics & Communication Engineering results, visit Anna University ECE all semester results direct link.