MEMS Design detailed syllabus for Electronics & Telecommunication Engineering (ETE) for 2021 regulation curriculum has been taken from the Anna Universities official website and presented for the ETE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Electronics & Telecommunication Engineering 6th Sem scheme and its subjects, do visit ETE 6th Sem 2021 regulation scheme. For Professional Elective-VI scheme and its subjects refer to ETE Professional Elective-VI syllabus scheme. The detailed syllabus of mems design is as follows.
Course Objectives:
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Unit I
ESSENTIAL ELECTRIC AND MECHANICAL CONCEPTS
Conductivity of semiconductors, Crystal planes and orientations, stress and strain, flexural beam bending analysis under simple loading conditions, Dynamic system, resonant frequency and quality factor
Unit II
ELECTRO STATIC SESNING AND ACTUATION
Parallel plate capacitor, Applications of parallel plate capacitors- inertial sensor, pressure sensor, flow sensor, tactile sensor, parallel plate actuators, interdigitated finger capacitors, applications of comb drive devices.
Unit III
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Unit IV
PIEZOELECTRIC SENSING AND ACTUATION
Mathematical description of piezoelectric effects, Cantilever piezoelectric actuator model, properties of piezoelectric materials -Quartz, PZT,PVDF, ZnO , Applications – Acoustic sensors, Tactile sensors
Unit V
MAGNETIC SENSING AND ACTUATION
Concepts and principles- magnetization and nomenclatures, principles of micromagnetic actuators, fabrication of micro magnetic components- deposition, design and fabrication of magnetic coil, MEMS magnetic actuators
Practical Exercises
- Design and simulation of piezoelectric cantilever
- Design and simulation of thermo couples
- Design and simulation of comb drive actuators
Course Outcomes:
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Text Books:
- Chang Liu, “Foundations of MEMS”, Pearson education India limited, 2006
Reference Books:
- Murty B.S, Shankar P, Raj B, Rath, B.B, Murday J, Textbook of Nanoscience and Nanotechnology, Springer publishing, 2013.
- Sergey Edward Lyshevski, “MEMS and NEMS: Systems, Devices, and Structures”, CRC Press, 2002
- Tai Ran Hsu, MEMS and Microsystems Design and Manufacture, Tata Mcgraw Hill, 2002
- Vinod Kumar Khanna Nanosensors: Physical, Chemical, and Biological, CRC press,2012.
For detailed syllabus of all the other subjects of Electronics & Telecommunication Engineering 6th Sem, visit ETE 6th Sem subject syllabuses for 2021 regulation.
For all Electronics & Telecommunication Engineering results, visit Anna University ETE all semester results direct link.