MEMS and its Biomedical Applications detailed syllabus for Biomedical Engineering (Biomedical) for 2019 regulation curriculum has been taken from the Anna Universities official website and presented for the Biomedical students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below.
For Biomedical Engineering 6th Sem scheme and its subjects, do visit Biomedical 6th Sem 2019 regulation scheme. For Professional Elective-III scheme and its subjects refer to Biomedical Professional Elective-III syllabus scheme. The detailed syllabus of mems and its biomedical applications is as follows.
Course Objective:
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Unit I
Mems Materials and Fabrication
Typical MEMs and Microsystems, materials for MEMS – active substrate materials-Silicon and its compounds, Silicon piezoresistors, Gallium Arsenide, quartz, polymers. Micromachiningphotolithography, thin film deposition, doping, etching, bulk machining, wafer bonding, LIGA.
Unit II
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Unit III
Electrostatic, Piezoelectric Sensors and Actuators
Parallel plate capacitor, pull in effect, Electrostatic sensors and actuators- Inertia sensor, Pressure sensor, flow sensor, tactile sensor, comb drive. Properties of piezoelectric materials, Piezoelectric sensor and actuator – inchworm motor, inertia sensor, flow sensor.
Unit IV
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Unit V
Applications of Biomems
CAD for MEMs, Drug delivery, micro total analysis systems (MicroTAS) detection and measurement methods, microsystem approaches to polymerase chain reaction (PCR),DNA sensor, MEMS based drug delivery, electronic nose. Introduction to 3D printing.
Course Outcome:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
Text Books:
- Chang Liu, ” Foundations of MEMS”, Pearson Education International, New Jersey, USA, 2nd Edition, 2011.
- Tai Ran Hsu , “MEMS and Microsystems design and manufacture”, Tata McGraw Hill Publishing Company, New Delhi, 2002
References:
- Wanjun Wang, Stephen A.Soper, “BioMEMS: Technologies and applications”, CRC Press, New York, 2007
- Marc J. Madou, “Fundamentals of Microfabrication: the science of miniaturization””, CRC Press, 2002.
- Nadim Maluf, Kirt Williams, “An Introduction to Microelectro mechanical Systems Engineering”, Second Edition, Artech House Inc, MA, 2004.
- Nitaigour Premchand Mahalik, “MEMS”, Tata McGraw Hill Publishing Company, New Delhi, 2007.
For detailed syllabus of all the other subjects of Biomedical Engineering 6th Sem, visit Biomedical 6th Sem subject syllabuses for 2019 regulation.
For all Biomedical Engineering results, visit Anna University Biomedical all semester results direct link.