Anna University B.Tech MF (R13) 8th Sem Micromachining Processes Detailed Syllabus

Micromachining Processes Syllabus for B.Tech 8th sem is covered here. This gives the details about credits, number of hours and other details along with reference books for the course.

The detailed syllabus for Micromachining Processes B.Tech (R13) eighthsem is as follows

OBJECTIVES: Upon completion of this subject, student will be able to:

• Understand principle of microsystems and feed back systems
• Know the different methods of microfabrication.
• Understand the properties and microstructure of materials
• Appreciate Integration processes in detail
• Enhance his knowledge in semiconductor manufacturing processes.

UNIT I : INTRODUCTION       [8 Hours]
Introduction to Micro System design, Material properties, micro fabrication technologies. Structural behavior, sensing methods, micro scale transport – feed back systems.

UNIT II : MICROMECHANICS     [9 Hours]
Microstructure of materials, its connection to molecular structure and its consequences on macroscopic properties – Phase transformations in crystalline solids including martensite, ferroelectric, and diffusional phase transformations, twinning and domain patterns, smart materials

UNIT III : BASIC MICRO-FABRICATION     [10 Hours]
Bulk Processes – Surface Processes – Sacrificial Processes and Bonding Processes – Special machining: Laser beam micro machining – Electrical Discharge Machining – Ultrasonic Machining – Electro chemical Machining. Electron beam machining.

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[TOTAL : 45 PERIODS]

OUTCOMES

• Ability to fabricate semiconductor devices using micro machining techniques
• Ability to design micro systems and know different micro fabrication system.

TEXT BOOK

• Sami Franssila, “Introduction to Micro Fabrication”, John Wiley and sons Ltd., UK, 2004, ISBN: 978-0-470-85106-7

REFERENCES:

• Madore J, “Fundamental of Micro Fabrication”, CRC Press, 2002
• Mark J. Jackson, “Microfabrication and Nanomanufacturing”, CRC Press, 2006
• Peter Van Zant, “Microchip fabrication”, McGraw Hill, 2004
• Mohamed Gad-el-Hak, “The MEMS Handbook”, CRC Press, 2006

For all other B.Tech MF 8th sem syllabus go to Anna University B.Tech MANUFACTURING ENGINEERING (MF) 8th Sem Course Structure for (R13) Batch.All details and yearly new syllabus will be updated here time to time. Subscribe, like us on facebook and follow us on google plus for all updates.

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