Anna University B.Tech EEE (R13) 7th Sem Micro Electro Mechanical Systems Detailed Syllabus

Micro Electro Mechanical Systems Syllabus for B.Tech 7th sem is covered here. This gives the details about credits, number of hours and other details along with reference books for the course.

The detailed syllabus for Micro Electro Mechanical Systems B.Tech (R13) seventhsem is as follows

OBJECTIVES:

• To provide knowledge of semiconductors and solid mechanics to fabricate MEMS devices.
• To educate on the rudiments of Micro fabrication techniques.
• To introduce various sensors and actuators
• To introduce different materials used for MEMS
• To educate on the applications of MEMS to disciplines beyond Electrical and Mechanical engineering.

UNIT I: INTRODUCTION     [9 hours]
Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication – Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices – Stress and strain analysis – Flexural beam bending- Torsional deflection.

UNIT II : SENSORS AND ACTUATORS-I     [9 hours]
Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors – Thermal Sensing and Actuation – Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph – Applications – Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys.

UNIT III : SENSORS AND ACTUATORS-II      [9 hours]
Piezoresistive sensors – Piezoresistive sensor materials – Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.

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[TOTAL : 45 PERIODS]

OUTCOMES:

• Ability to understand the operation of micro devices, micro systems and their applications.
• Ability to design the micro devices, micro systems using the MEMS fabrication process.

TEXT BOOKS:

• Chang Liu, ‘Foundations of MEMS’, Pearson Education Inc., 2012.
• Stephen D Senturia, ‘Microsystem Design’, Springer Publication, 2000.
• Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill, New Delhi, 2002.

REFERENCES:

• Nadim Maluf,“ An Introduction to Micro Electro Mechanical System Design”, Artech House, 2000.
• Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2001.
• Julian w. Gardner, Vijay K. Varadan, Osama O.Awadelkarim, Micro Sensors MEMS and Smart Devices, John Wiley & Son LTD, 2002.
• James J.Allen, Micro Electro Mechanical System Design, CRC Press Publisher, 2005.
• Thomas M.Adams and Richard A.Layton, “Introduction MEMS, Fabrication and Application,” Springer, 2010.

For all other B.Tech EEE 7th sem syllabus go to Anna University B.Tech ELECTRICAL AND ELECTRONICS ENGINEERING (EEE) 7th Sem Course Structure for (R13) Batch.All details and yearly new syllabus will be updated here time to time. Subscribe, like us on facebook and follow us on google plus for all updates.

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