MEMS and its applications detailed syllabus for Electronics & Instrumentation Engineering (EIE), R18 regulation has been taken from the JNTUHs official website and presented for the students of B.Tech Electronics & Instrumentation Engineering branch affiliated to JNTUH course structure. For Course Code, Course Titles, Theory Lectures, Tutorial, Practical/Drawing, Credits, and other information do visit full semester subjects post given below. The syllabus PDF files can also be downloaded from the universities official website.
For all the other EIE 4th Year 1st Sem Syllabus for B.Tech R18 Regulation JNTUH scheme, visit Electronics & Instrumentation Engineering 4th Year 1st Sem R18 Scheme.
For all the (Professional Elective-3) subjects refer to Professional Elective-3 Scheme. The detail syllabus for mems and its applications is as follows.
Course Objective:
The course is intended for students to:
- Acquire knowledge about MEMS devices and their applications in various domains.
- Understand the techniques to fabricate MEMS devices.
- Learn the design considerations for MEMS devices and Microsystems.
- Learning to characterize Microsystems using optical and electron microscopy and other techniques.
Course Outcome:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier.
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Unit – I
Fundamentals of MEMS: Overview of MEMS and Microsystems; Evolution of microfabrication; Applications of MEMS in optical devices (Micro-Opto-Electro-Mechanical Systems or MOEMS), healthcare and biomedicine (including Bio-MEMS and Bio-MOEMS), aerospace, telecommunications, consumer products, automotive, and industrial products; Working principles of microsystems: Microsensors – acoustic wave, bio-, chemical, optical, pressure, thermal; Microactuation – thermal, shape-memory alloys, piezoelectric, electrostatic; MEMS devices – Microgrippers; Micromotors; Microfluidics – Micropumps, Microvalves; Micro accelerometers
Unit – II
Materials for MEMS and Microsystems: Substrates and Wafers; Silicon as a Substrate, Silicon Compounds, Silicon piezoresistors, Non-silicon-based materials: Gallium Arsenide, Gallium Nitride, Quartz, Piezeoelectric Crystals, Polymers.
Unit – III
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Unit – IV
Fabrication of MEMS: Bulk micromachining, Surface micromachining, LIGA Process, Deep X-Ray Lithography (DXRL)
Unit – V
Characterization of MEMS: Characterization techniques: Principle of working and operation of: Scanning Electron Microscope (SEM), Transmission Electron Microscope (TEM), Atomic Force Microscope (AFM), X-Ray Diffraction (XRD), Optical microscope
Text Books:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
Reference Books:
- Marc J. Madou, Fundamentals of Microfabrication: The Science of Miniaturizationd, CRC Press, 2002 (ISBN: 978-0849308260)
- Stephen D. Senturia, Microsystem Designd, Springer, 2004 (ISBN: 9788181285461)
- Ville Kaajakari, Practical MEMSd, Small Gear Publishing, 2009 (ISBN: 9780982299104)
For detail syllabus of all other subjects of B.Tech Electronics & Instrumentation Engineering 4th Year 1st Sem , visit EIE 4th Year 1st Sem syllabus subjects.
For B.Tech Electronics & Instrumentation Engineering (EIE) 4th Year results, visit JNTUH B.Tech Electronics & Instrumentation Engineering semester results direct link.