Micro Electro Mechanical Systems detail syllabus for Electronics & Communication Engineering (ECE), 2017 scheme is taken from VTU official website and presented for VTU students. The course code (17EC831), and for exam duration, Teaching Hr/week, Practical Hr/week, Total Marks, internal marks, theory marks, duration and credits do visit complete sem subjects post given below.
For all other ece 8th sem syllabus for be 2017 scheme vtu you can visit ECE 8th Sem syllabus for BE 2017 Scheme VTU Subjects. For all other Professional Elective -5 subjects do refer to Professional Elective -5. The detail syllabus for micro electro mechanical systems is as follows.
Course Objectives:
This course will enable students to:
- Understand overview of microsystems, their fabrication and application areas.
- Working principles of several MEMS devices.
- Develop mathematical and analytical models of MEMS devices.
- Know methods to fabricate MEMS devices.
- Various application areas where MEMS devices can be used.
Module 1
For complete syllabus and results, class timetable and more pls download iStudy. Its a light weight, easy to use, no images, no pdfs platform to make students life easier.
Module 2
Working Principles of Microsystems: Introduction, Microsensors, Microactuation, MEMS with Microactuators, Microaccelerometers, Microfluidics. Engineering Science for Microsystems Design and Fabrication: Introduction, Molecular Theory of Matter and Inter-molecular Forces, Plasma Physics, Electrochemistry.
Module 3
Engineering Mechanics for Microsystems Design: Introduction, Static Bending of Thin Plates, Mechanical Vibration, Thermomechanics, Fracture Mechanics, Thin Film Mechanics, Overview on Finite Element Stress Analysis.
Module 4
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Module 5
Overview of Micromanufacturing: Introduction, Bulk Micromanufacturing, Surface Micromachining, The LIGA Process, Summary on Micromanufacturing.
Course Outcomes:
After studying this course, students will be able to:
- Appreciate the technologies related to Micro Electro Mechanical Systems.
- Understand design and fabrication processes involved with MEMS devices.
- Analyse the MEMS devices and develop suitable mathematical models
- Know various application areas for MEMS device
Text Books:
Tai-Ran Hsu, MEMS and Micro systems: Design, Manufacture and Nanoscale Engineering, 2nd Ed, Wiley.
Reference Books:
- Hans H. Gatzen, Volker Saile, JurgLeuthold, Micro and Nano Fabrication: Tools and Processes, Springer, 2015.
- Dilip Kumar Bhattacharya, Brajesh Kumar Kaushik, Microelectromechanical Systems (MEMS), Cenage Learning.
For detail syllabus of all other subjects of BE Ece, 2017 regulation do visit Ece 8th Sem syllabus for 2017 Regulation.
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