Mems and Nems detail syllabus for Nanoelectronics (Nano), 2017 scheme is taken from VTU official website and presented for VTU students. The course code (17NT73), and for exam duration, Teaching Hr/week, Practical Hr/week, Total Marks, internal marks, theory marks, duration and credits do visit complete sem subjects post given below.
For all other nano 7th sem syllabus for be 2017 scheme vtu you can visit Nano 7th Sem syllabus for BE 2017 Scheme VTU Subjects. The detail syllabus for mems and nems is as follows.
Course Objectives:
- To understand the basic components of MEMS and NEMS
- To study, design the MEMS and NEMS based devices
Module 1:
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Module 2:
TRANSDUCTION PLATFORMS Introduction – Conductometric and Capacitive Transducers, Optical Waveguide based Transducers, Electrochemical Transducers, Solid State Transducers – Schottky Diode based Transducers – p-n Diodes or Bipolar Junction based Transducers – MOS Capacitor based Transducers, Acoustic Wave Transducers – Cantilever based Transducers – Quartz Crystal Microbalance – Film Bulk Acoustic Wave Resonator. 10
Module 3:
MICROMACHINING Types of wafers, orientation, Photolithography, Etching methods, Silicon polishing, surface and bulk micromachining, Thin film deposition techniques sputtering, CVD, epitaxial growth, thermal oxidation, wafer bonding. MEMS MATERIALS Single crystal silicon, poly silicon, SiO2, SiN, Germanium based materials, metals, SiC, diamond III-V materials, piezoelectric materials. 10
Module 4:
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Module 5:
NANOELECTROMECHANICAL SYSTEMS (NEMS) Introduction- Nano machining of NEMS based upon electron beam lithography, Nano electromechanical systems fabrication, nano imprint lithography, polymeric nano fibre templates, focused ion beam doping and wet chemical etching, stencil lithography and sacrificial etching, large scale integration, future challenges, applications. 10
Course Outcomes:
Students can
- understand the basic components of MEMS and NEMS
- study, design the MEMS and NEMS based devices
Graduate Attributes (as per NBA):
- Engineering Knowledge.
- Problem Analysis.
- Design / development of solutions (partly).
- Interpretation of data.
Question paper pattern:
- The question paper will have ten questions.
- Each full Question consisting of 20 marks
- There will be 2 full questions (with a maximum of four sub questions) from each module.
- Each full question will have sub questions covering all the topics under a module.
- The students will have to answer 5 full questions, selecting one full question from each module.
Text Books:
- N. P. Mahalik, MEMS, Tata-McGraw Hill publication, 2009
- V. K. Aatre, G. K. Ananthasuresh, K. J. Vinoy, Micro & Smart System, Wiley India, 2010.
- Karlglosekotter, Nanoelectronics and Nanosystems, Springer, 2004
- KouroshKalantar-zadeh, Benjamin Fry, Nanotechnology-Enabled Sensors, springer.
Reference Books:
- Michael Stroscio, MitraDutta, Biological nanostructures and applications of nanostructures in biology, Kluwer academic publishers, 2004.
- H. Fujita, Micromachines as Tools for Nanotechnology, Springer, 2003.
- J.B. Park, Biomaterials Science and Engineering, Ed. 2, Narosa Publishers, New Delhi, 2005
For detail syllabus of all other subjects of BE Nano, 2017 scheme do visit Nano 7th Sem syllabus for 2017 scheme.
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