15MC54A: Mems Mechatronics 5th Sem Syllabus for Diploma DTE Karnataka C15 Scheme

Mems detail syllabus for Mechatronics Engineering (75), C15 scheme is taken from DTE Karnataka official website and presented for diploma students. The course code (15MC54A), and for exam duration, Teaching Hr/week, Practical Hr/week, Total Marks, internal marks, theory marks, duration and credits do visit complete sem subjects post given below.

For all other mechatronics 5th sem syllabus for diploma c15 scheme dte karnataka you can visit Mechatronics 5th Sem Syllabus for Diploma C15 Scheme DTE Karnataka Subjects. For all other Elective-I subjects do refer to Elective-I. The detail syllabus for mems is as follows.

Pre-requisites:

Knowledge of Applied Science, measurement system

Course Objectives:

Understand the importance and application of micro electro mechanical systems.

Course Outcomes:

For complete syllabus and results, class timetable and more pls download iStudy. Its a light weight, easy to use, no images, no pdfs platform to make students life easier.

Unit-I Introduction to Micro System and Smart System

Microsystem, MEMS, System-on-a-chip, Application of MEMS, Smart Material System,
Components of a Smart System, Engineering disciplines involved in Micro system Design,
Manufacture & Packaging. 06 Hours

Unit-II Micro Sensors & Actuators

Introduction to sensors and actuators, principle of operation, advantages and applications of Silicon Capacitive Accelerometer, Piezoresistive Pressure Sensors, Conductometric Gas Sensor, Electrostatic Comb-Drive, Magnetic Micro relay, Portable Blood Analyzer, Piezoelectric Inkjet Print head.

Unit-III Materials for Microsystems and Smart System

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Scaling in Microsystems

Introduction to Scaling and its importance, simple scaling law, Scaling in Geometry, Comparision of Macro & Micro worlds with pictorial depiction, Dynamic Forces, scaling in Heat Transfer, Scaling in, Electrostatic Forces, Scaling in Electricity, scaling in electromagnetic forces, scaling in fluid mechanics,

Unit-V Micro manufacturing and Microsystems Fabrication

Introduction to Micromachining or Micro manufacturing, Bulk Micro manufacturing by dry and wet etching with their comparison, Surface Micromachining, LIGA Process, Introduction to Microsystems fabrication- Silicon Wafer Preparation, Thin Film Deposition by thermal evaporation, sputtering and CVD processes, key processes involved in Photolithography, surface micro machining.

Unit-VI Microsystem Design & Packaging

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Reference Books:

1. MEMS & MICROSYSTEMS – Design and Manufacture by Tai-Ran Hsu , McGraw Hill Education Private Ltd.,
2. Micro and Smart Systems by G.K.Ananthasuresh, V.K.Aatre, K.J.Vinoy, S.Gopalakrshnan, K.N.Bhat, Wiley-India
3. MEMS by Mahalik, McGraw Hill Education Private Ltd.,

e-Reference

1. http://www.slideshare.net/navinec1/micro-electromechanical-system-mems
2. https://www.mems-exchange.org/MEMS/what-is.html
3. http://mspde.usc.edu/inspiring/resource/sensor/Microsensors.pdf
4. http://www.engr.sjsu.edu/trhsu/ME189 Chapter%207.pdf
5. http://www.technologystudent.com/equip1/sma1.htm
6. http://www.slideshare.net/deepika46/smart-materials-39205546
7. http://www.engr.sjsu.edu/trhsu/ME189 Chapter%206.pdf
8. http://www.engr.sjsu.edu/trhsu/ME189 Chapter%209.pdf
9. http://www.gbv.de/dms/ilmenau/toc/330321218.PDF
10. http://www.pitt.edu/~qiw4/Academic/ME2080/lecture23.pdf

Student Activity

1. Write a report on micro systems or micro sensors not mention in the curriculum.(Hand written 2 or 3 pages)

Note:

1. Group of max four students should do any one of the above activity or any other similar activity related to the course COs and get it approved from concerned Teacher and HOD.
2. No group should have activity repeated or similar
3. Teacher should asses every student as approved by HOD

Institutional Activity

[Activity No Description of the Institutional Activity]

1. Organize seminar, workshop, lecture from eminent person in the following domain:
1. micro sensors and actuators
2. micro electro mechanical systems
3. nano technology

Model Question Paper:

(CIE)

1. Explain briefly miniaturization and micro system OR Explain typical smart system with block diagram
2. Explain application of MEMS in automotive industry. OR Explain application of MEMS in aero space industry
3. Explain in detail of functioning sensors with examples OR Explain in detail of functioning actuators with examples
4. Explain the principle of operation of Magnetic Micro relay OR Explain the principle of operation of Piezoelectric Inkjet Print head

Model Question Paper:

PART-A

Answer any six questions. 5X6=30 marks

1. Explain difference between MEMS and micro system
2. Explain materials used for capacitive accelerometer and for Electrostatic Comb-Drive
3. Explain micro sensor and micro actuator with an example for each
4. Explain group of materials that are classified as electric Conductors, Semiconductors & Insulators
5. Explain Scaling in Geometry
6. Explain general process of Surface Micro machining
7. Explain silicon wafer preparation
8. Explain merits and demerits of bulk micro manufacturing
9. Explain mechanical engineering Design of micro system over that of other products

PART- B

Answer any seven full questions. 10X7=70M

1. Explain five engineering discipline involved in micro system design, manufacture and packaging
2. Explain the principle of operation of silicon capacitive accelerometer
1. Explain micro sensor and micro actuator with an example for each
2. Explain the applications of polymers for mems and micro systems
4. Explain briefly 3 silicon compounds often used in micro systems
1. Explain Scaling in Geometry
2. Explain scaling in fluid mechanics
1. Explain pictorial depiction of the scaling law compare Macro & Microworlds
2. Explain principal substrate materials used in micro system
7. Explain thin film deposition by thermal CVD processes
8. Explain with sketches major steps in the LIGA Process
9. Explain principal design requirements in packaging design
10. Explain mechanical design parameters with respect to thermo mechanical stress analysis

For detail syllabus of all other subjects of BE Mechatronics, C15 regulation do visit Mechatronics 5 syllabus for C15 Regulation.

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