Introduction To Mems detail syllabus for Electrical & Electronics Engineering (EEE), 2021-22 scheme is taken from AKTUs official website and presented for the AKTU B.Tech students. For the course code (KOE063), exam duration, teaching hr/week, practical hr/week, total marks, internal marks, theory marks, duration, credits, and other details do visit complete semester subjects post given below.
For the EEE 7th Sem Syllabus for AKTU B.Tech 2021-22 Scheme you can visit EEE 7th Sem 2021-22 Scheme. For the Open Elective-1 scheme of EEE 7th Sem 2021-22 regulation do refer to Open Elective-1 EEE 7th Sem scheme. The detail syllabus for introduction to mems is as follows.
Course Objectives:
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Course Outcomes:
After completion of the course student will be able to:
- Understand the Basic concept of MEMS Fabrication Technologies, Piezoresistance Effect, Piezoelectricity, Piezoresistive Sensor.
- Explain Mechanics of Beam and Diaphragm Structures.
- Understand the Basic concept of Air Damping and Basic Equations for Slide-film Air Damping, Couette-flow Model, Stokes-flow Model.
- Know the concept of Electrostatic Actuation.
- Understand the applications of MEMS in RF
Unit 1
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Unit 2
Mechanics of Beam and Diaphragm Structures: Stress and Strain, Hooke’s Law. Stress and Strain of Beam Structures: Stress, Strain in a Bent Beam, Bending Moment and the Moment of Inertia, Displacement of Beam Structures Under Weight, Bending of Cantilever Beam Under Weight.
Unit 3
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Unit 4
Electrostatic Actuation: Electrostatic Forces, Normal Force, Tangential Force, Fringe Effects, Electrostatic Driving of Mechanical Actuators: Parallel-plate Actuator, Capacitive sensors. Step and Alternative Voltage Driving: Step Voltage Driving, Negative Spring Effect and Vibration Frequency.
Unit 5
Thermal Effects: Temperature coefficient of resistance, Thermo-electricity, Thermocouples, Thermal and temperature sensors. Applications of MEMS in RF MEMS Resonator Design Considerations, One-Port Micromechanical Resonator Modeling Vertical Displacement Two-Port Microresonator Modeling, Micromechanical Resonator Limitations.
Text & Reference Books:
- G. K. Ananthasuresh, K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat and V. K. Atre, ‘Micro and smart systems’, Wiley India, 2010.
- S.M. Sze, ‘Semiconductor Sensors’, John Wiley & Sons Inc., Wiley Interscience Pub.
- M.J. Usher, ‘Sensors and Transducers’, McMillian Hampshire.
- RS Muller, Howe, Senturia and Smith, ‘Micro sensors’, IEEE Press.
For the syllabus of all the subjects of B.Tech EEE 7th Sem, 2021-22 scheme do visit EEE 7th Sem syllabus subjects.
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier.