{"id":18013,"date":"2020-09-10T04:19:58","date_gmt":"2020-09-10T04:19:58","guid":{"rendered":"https:\/\/www.inspirenignite.com\/mh\/pr-801d-micro-electro-mechanical-systems-syllabus-for-pr-8th-sem-2019-20-dbatu-elective-vii\/"},"modified":"2020-09-10T04:19:58","modified_gmt":"2020-09-10T04:19:58","slug":"pr-801d-micro-electro-mechanical-systems-syllabus-for-pr-8th-sem-2019-20-dbatu-elective-vii","status":"publish","type":"post","link":"https:\/\/www.inspirenignite.com\/mh\/pr-801d-micro-electro-mechanical-systems-syllabus-for-pr-8th-sem-2019-20-dbatu-elective-vii\/","title":{"rendered":"PR 801D: Micro Electro Mechanical Systems Syllabus for PR 8th Sem 2019-20 DBATU (Elective-VII)"},"content":{"rendered":"<p align=\"justify\">Micro Electro Mechanical Systems detailed syllabus scheme for Production Engineering (PR), 2019-20 onwards has been taken from the <a href=\"https:\/\/dbatu.ac.in\/syllabus-and-course-structure-for-b-tech-programs\/\" style=\"color: inherit\" target=\"_blank\" rel=\"noopener\">DBATU<\/a> official website and presented for the Bachelor of Technology students. For Subject Code, Course Title, Lecutres, Tutorials, Practice, Credits, and other information, do visit full semester subjects post given below. <\/p>\n<p align=\"justify\">For 8th Sem Scheme of Production Engineering (PR), 2019-20 Onwards, do visit <a href=\"dbatu-syllabus-for-production-engineering-8th-sem-2019-20\">PR 8th Sem Scheme, 2019-20 Onwards<\/a>. For the Elective-VII scheme of 8th Sem 2019-20 onwards, refer to <a href=\"elective-vii-syllabus-scheme-for-production-engineering-8th-sem-2019-20-dbatu\">PR 8th Sem Elective-VII Scheme 2019-20 Onwards<\/a>. The detail syllabus for micro electro mechanical systems is as follows.<\/p>\n<h2 align=\"center\">Micro Electro Mechanical Systems Syllabus for Production Engineering (PR) 4th Year 8th Sem 2019-20 DBATU<\/h2>\n<p>  <title>Micro Electro Mechanical Systems<\/title><\/p>\n<h4>Course Objectives:<\/h4>\n<p id=\"istudy\" style=\"text-align:center\">For the complete syllabus, results, class timetable, and many other features kindly download the <a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">iStudy App<\/a><br \/><b> It is a lightweight, easy to use, no images, and no pdf platform to make students&#8217;s lives easier.<\/b><br \/><a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy&amp;pcampaignid=pcampaignidMKT-Other-global-all-co-prtnr-py-PartBadge-Mar2515-1\" target=\"_blank\" rel=\"noopener\"><img decoding=\"async\" src=\"https:\/\/play.google.com\/intl\/en_us\/badges\/static\/images\/badges\/en_badge_web_generic.png\" alt=\"Get it on Google Play\" style=\"height:65px\"><\/a>.  <\/p>\n<h4>Pre-requisite:<\/h4>\n<p>  None<\/p>\n<h4>Course Outcomes:<\/h4>\n<p>  At the end of the course, students will be able to:<\/p>\n<ul>\n<li>Outline the development of MEMS and identify challenges<\/li>\n<li>Classify substrates for MEMS and allied techniques for substrate applications<\/li>\n<li>Define principles of microsystems and classify sensors, actuators and sealing devices<\/li>\n<li>List the various materials used for microsystems and their packaging<\/li>\n<li>Identify fabrication method of microsystems for MEMS<\/li>\n<li>Illustrate micromanufacturing of MEMS with packaging reliability aspects<\/li>\n<\/ul>\n<h4>Unit 1<\/h4>\n<p id=\"istudy\" style=\"text-align:center\">For the complete syllabus, results, class timetable, and many other features kindly download the <a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">iStudy App<\/a><br \/><b> It is a lightweight, easy to use, no images, and no pdf platform to make students&#8217;s lives easier.<\/b><br \/><a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy&amp;pcampaignid=pcampaignidMKT-Other-global-all-co-prtnr-py-PartBadge-Mar2515-1\" target=\"_blank\" rel=\"noopener\"><img decoding=\"async\" src=\"https:\/\/play.google.com\/intl\/en_us\/badges\/static\/images\/badges\/en_badge_web_generic.png\" alt=\"Get it on Google Play\" style=\"height:65px\"><\/a>.  <\/p>\n<h4>Unit 2<\/h4>\n<p>  <strong>Fundamentals of Substrates<\/strong><br \/>\n  Fundamentals of Material Science, Substrates: Single crystal substrates, Silicon on Insulator Substrate, Physical vapour deposition, Chemical vapour Deposition, Etching Processes, patterning, wafer bonding, annealing, chemical mechanical polishing, material doping, MEMS application in life sciences<\/p>\n<h4>Unit 3<\/h4>\n<p>  <strong>Principle of Microsystems<\/strong><br \/>\n  Principal of Microsystems: Introduction, Microsensors and their types, Microactuation using different forces and materials, Microactuators and their types, Microaccelerometers, Microfluidics Scaling Laws in Miniatuarization: Introduction to scaling, Scaling of physical systems scaling (geometric, mechanical, thermal, fludic, electrical, optical and chemical and biological), computational fabrication, and material issues<\/p>\n<h4>Unit 4<\/h4>\n<p id=\"istudy\" style=\"text-align:center\">For the complete syllabus, results, class timetable, and many other features kindly download the <a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">iStudy App<\/a><br \/><b> It is a lightweight, easy to use, no images, and no pdf platform to make students&#8217;s lives easier.<\/b><br \/><a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy&amp;pcampaignid=pcampaignidMKT-Other-global-all-co-prtnr-py-PartBadge-Mar2515-1\" target=\"_blank\" rel=\"noopener\"><img decoding=\"async\" src=\"https:\/\/play.google.com\/intl\/en_us\/badges\/static\/images\/badges\/en_badge_web_generic.png\" alt=\"Get it on Google Play\" style=\"height:65px\"><\/a>.  <\/p>\n<h4>Unit 5<\/h4>\n<p>  <strong>Microsystem Fabrication and Manufacturing<\/strong><br \/>\n  Microsystem Fabrication Process and Manufacturing: Introduction, Photolithography, Ion implantation, Diffusion, Oxidation, Chemical vapour deposition, physical vapour deposition, Chemical Mechanical Polishing, Material Doping, Deposition of epitaxy, Etching, Patterning, wafer-bonding and annealing.<\/p>\n<h4>Unit 6<\/h4>\n<p>  <strong>Micromanufacturing<\/strong><br \/>\n  Micromanufacturing: Bulk micromachining, Surface micromachining, LIGA, Packaging and Reliability: Packaging process steps, reliability models, MEMS failure mechanisms, Measurement Techniques for MEMS Operational, Reliability, and Failure Analysis Testing<\/p>\n<h4>Text Books:<\/h4>\n<ol>\n<li>Tai-Ran Hsu, MEMS and Microsystems Design and Manufacture, Fourth reprint edition, 2012<\/li>\n<li>Allen James J, Micro Electromechanical System Design, First edition, Taylor and Farancis, FL (USA), 2005<\/li>\n<li>Maluf Nadim and Williams Kirt, An Introduction to Micro-electro-mechanical Systems Engineering, Second Edition, ARTECH House, MA (USA), 2004.<\/li>\n<\/ol>\n<h4>Reference Books:<\/h4>\n<p id=\"istudy\" style=\"text-align:center\">For the complete syllabus, results, class timetable, and many other features kindly download the <a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">iStudy App<\/a><br \/><b> It is a lightweight, easy to use, no images, and no pdf platform to make students&#8217;s lives easier.<\/b><br \/><a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy&amp;pcampaignid=pcampaignidMKT-Other-global-all-co-prtnr-py-PartBadge-Mar2515-1\" target=\"_blank\" rel=\"noopener\"><img decoding=\"async\" src=\"https:\/\/play.google.com\/intl\/en_us\/badges\/static\/images\/badges\/en_badge_web_generic.png\" alt=\"Get it on Google Play\" style=\"height:65px\"><\/a>.<\/p>\n<p align=\"justify\">For detail syllabus of all subjects of Production Engineering (PR) 8th Sem 2019-20 onwards, visit <a href=\"..\/category\/dbatu\/8th-sem-dbatu\">PR 8th Sem Subjects <\/a>of 2019-20 Onwards.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Micro Electro Mechanical Systems detailed syllabus scheme for Production Engineering (PR), 2019-20 onwards has been taken from the DBATU official website and presented for the Bachelor of Technology students. For [&hellip;]<\/p>\n","protected":false},"author":2351,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_bbp_topic_count":0,"_bbp_reply_count":0,"_bbp_total_topic_count":0,"_bbp_total_reply_count":0,"_bbp_voice_count":0,"_bbp_anonymous_reply_count":0,"_bbp_topic_count_hidden":0,"_bbp_reply_count_hidden":0,"_bbp_forum_subforum_count":0,"footnotes":""},"categories":[112],"tags":[],"class_list":["post-18013","post","type-post","status-publish","format-standard","hentry","category-pr-dbatu"],"_links":{"self":[{"href":"https:\/\/www.inspirenignite.com\/mh\/wp-json\/wp\/v2\/posts\/18013","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.inspirenignite.com\/mh\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.inspirenignite.com\/mh\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.inspirenignite.com\/mh\/wp-json\/wp\/v2\/users\/2351"}],"replies":[{"embeddable":true,"href":"https:\/\/www.inspirenignite.com\/mh\/wp-json\/wp\/v2\/comments?post=18013"}],"version-history":[{"count":0,"href":"https:\/\/www.inspirenignite.com\/mh\/wp-json\/wp\/v2\/posts\/18013\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.inspirenignite.com\/mh\/wp-json\/wp\/v2\/media?parent=18013"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.inspirenignite.com\/mh\/wp-json\/wp\/v2\/categories?post=18013"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.inspirenignite.com\/mh\/wp-json\/wp\/v2\/tags?post=18013"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}