Processing and Manufacturing of Semiconductors detailed syllabus scheme for Production Engineering (PR), 2019-20 onwards has been taken from the DBATU official website and presented for the Bachelor of Technology students. For Subject Code, Course Title, Lecutres, Tutorials, Practice, Credits, and other information, do visit full semester subjects post given below.
For 8th Sem Scheme of Production Engineering (PR), 2019-20 Onwards, do visit PR 8th Sem Scheme, 2019-20 Onwards. For the Elective-X scheme of 8th Sem 2019-20 onwards, refer to PR 8th Sem Elective-X Scheme 2019-20 Onwards. The detail syllabus for processing and manufacturing of semiconductors is as follows.
Processing and Manufacturing of Semiconductors Syllabus for Production Engineering (PR) 4th Year 8th Sem 2019-20 DBATU
Course Objectives:
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Pre-requisite:
Course Outcomes:
At the end of the course, students will be able to:
- Classify types of semiconductors and list their applications.
- Identify basic requirements of IC manufacturing and micro fabrication industries.
- Select suitable processing sequence for IC manufacturing.
- Define and illustrate the techniques of finishing of ICs.
- Outline the modern semiconductor manufacturing processes such as CMOS, BiCMOS.
- Demonstrate types of packaging and its methods.
Unit 1
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Unit 2
Basic Requirements for Semiconductor Manufacturing
clean room – yield model -Wafer IC manufacturing – feature micro fabrication technologies – PSM – IC industry – New Materials – Bonding and layer transfer – devices -micro fabrication industries
Unit 3
Processing Sequence
Oxidation – Growth kinetics, thin oxide growth, oxide quality – photolithography -Exposure tools, pattern transfer, deep UV sub-micron, E-beam lithography, X-Ray lithography – Etching – Wet chemical and dry etching
Unit 4
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Unit 5
Modern Semiconductor Manufacturing
Process integration – Bipolar technology, CMOS technology – CMOS fabrication sequence – BiCMOS technology
Unit 6
Packaging
Packaging, Die separation, Package types, attachment methods
Reference Books:
- Yoshio Nishi, Robert Doering, Handbook of Semiconductor Manufacturing Technology, Second Edition, CPC press, 2008
- Gary S. May, Costas J. Spanos, Fundamentals of Semiconductor Manufacturing and Process Control, Wiley- interscience, 2006
- Hwaiyu Geng, Semiconductor Manufacturing Handbook, McGraw Hill Professional, 2005
For detail syllabus of all subjects of Production Engineering (PR) 8th Sem 2019-20 onwards, visit PR 8th Sem Subjects of 2019-20 Onwards.