Micro Electro Mechanical Systems detailed syllabus scheme for Production Engineering (PR), 2019-20 onwards has been taken from the DBATU official website and presented for the Bachelor of Technology students. For Subject Code, Course Title, Lecutres, Tutorials, Practice, Credits, and other information, do visit full semester subjects post given below.
For 8th Sem Scheme of Production Engineering (PR), 2019-20 Onwards, do visit PR 8th Sem Scheme, 2019-20 Onwards. For the Elective-VII scheme of 8th Sem 2019-20 onwards, refer to PR 8th Sem Elective-VII Scheme 2019-20 Onwards. The detail syllabus for micro electro mechanical systems is as follows.
Micro Electro Mechanical Systems Syllabus for Production Engineering (PR) 4th Year 8th Sem 2019-20 DBATU
Course Objectives:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdf platform to make students’s lives easier.
.
Pre-requisite:
None
Course Outcomes:
At the end of the course, students will be able to:
- Outline the development of MEMS and identify challenges
- Classify substrates for MEMS and allied techniques for substrate applications
- Define principles of microsystems and classify sensors, actuators and sealing devices
- List the various materials used for microsystems and their packaging
- Identify fabrication method of microsystems for MEMS
- Illustrate micromanufacturing of MEMS with packaging reliability aspects
Unit 1
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdf platform to make students’s lives easier..
Unit 2
Fundamentals of Substrates
Fundamentals of Material Science, Substrates: Single crystal substrates, Silicon on Insulator Substrate, Physical vapour deposition, Chemical vapour Deposition, Etching Processes, patterning, wafer bonding, annealing, chemical mechanical polishing, material doping, MEMS application in life sciences
Unit 3
Principle of Microsystems
Principal of Microsystems: Introduction, Microsensors and their types, Microactuation using different forces and materials, Microactuators and their types, Microaccelerometers, Microfluidics Scaling Laws in Miniatuarization: Introduction to scaling, Scaling of physical systems scaling (geometric, mechanical, thermal, fludic, electrical, optical and chemical and biological), computational fabrication, and material issues
Unit 4
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdf platform to make students’s lives easier..
Unit 5
Microsystem Fabrication and Manufacturing
Microsystem Fabrication Process and Manufacturing: Introduction, Photolithography, Ion implantation, Diffusion, Oxidation, Chemical vapour deposition, physical vapour deposition, Chemical Mechanical Polishing, Material Doping, Deposition of epitaxy, Etching, Patterning, wafer-bonding and annealing.
Unit 6
Micromanufacturing
Micromanufacturing: Bulk micromachining, Surface micromachining, LIGA, Packaging and Reliability: Packaging process steps, reliability models, MEMS failure mechanisms, Measurement Techniques for MEMS Operational, Reliability, and Failure Analysis Testing
Text Books:
- Tai-Ran Hsu, MEMS and Microsystems Design and Manufacture, Fourth reprint edition, 2012
- Allen James J, Micro Electromechanical System Design, First edition, Taylor and Farancis, FL (USA), 2005
- Maluf Nadim and Williams Kirt, An Introduction to Micro-electro-mechanical Systems Engineering, Second Edition, ARTECH House, MA (USA), 2004.
Reference Books:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdf platform to make students’s lives easier..
For detail syllabus of all subjects of Production Engineering (PR) 8th Sem 2019-20 onwards, visit PR 8th Sem Subjects of 2019-20 Onwards.