Mems and Nems detailed syllabus scheme for Electronics & Telecommunication Engineering (ET), 2017 onwards has been taken from the DBATU official website and presented for the Bachelor of Technology students. For Subject Code, Course Title, Lecutres, Tutorials, Practice, Credits, and other information, do visit full semester subjects post given below.
For 5th Sem Scheme of Electronics & Telecommunication Engineering (ET), 2017 Onwards, do visit ET 5th Sem Scheme, 2017 Onwards. For the Elective-V scheme of 5th Sem 2017 onwards, refer to ET 5th Sem Elective-V Scheme 2017 Onwards. The detail syllabus for mems and nems is as follows.
Mems and Nems Syllabus for Electronics & Telecommunication Engineering (ET) 3rd Year 5th Sem 2017 DBATU
Course Objectives:
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Course Outcomes:
- This course provides the foundation education in MEMS through this subject study.
- Students are provided learning experience that enables them to be familiar with the important concepts applicable to MEMS, their fabrication.
- Be fluent with the design, analysis and testing of MEMS and application of the MEMS for different applications.
Unit 1
Introduction to MEMS
Introduction, History, Concepts of MEMS: Principles, application and design, Scaling Properties/Issues, Micromachining Processes: Substrates, lithography, wet/dry etching processes, deposition processes, film stress, exotic processes. Mechanical Transducers : transduction methods, accelerometers, gyroscopes ,pressure sensors, MEMS microphones, mechanical structures, actuators.
Unit 2
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Unit 3
Transducers
Chemical and Biological Transducers: basic concepts of cellular biology, chemical sensors, molecule-based biosensors, cell-based biosensors, chemical actuators, biological transducers, and electrophoresis: optical transducers, thermal transducers, magnetic transducers, RF transducers.
Unit 4
Overview Nano Technology:
MOS Scaling theory, Issues in scaling MOS, transistors: Short channel, effects, Description of a typical65 nm MOS technology. Requirements for Non classical MOS transistor, MOS capacitor, Role of interface quality and related process techniques, Gate oxide thickness scaling trend, SiO2 vs. High-k gate dielectrics, Integration, Issues of high-k .Interface states, bulk charge, band offset, stability, reliability – Qbd high field, possible candidates, CV and IV techniques.
Unit 5
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Unit 6
Nano electronics Semiconductor devices:
FTIR, XRD, AFM, SEM, TEM, EDAX Applications and interpretation of results, Emerging nano material, nano tubes, Nano rods and other Nano structures, LB technique, Soft lithography Microwave assisted synthesis, Self assembly.
Reference/Text Book:
- Kovacs, Gregory T. A. Micromachined Transducers Sourcebook McGraw-Hill.
- Max J. Madou: Fundamentals Of Micro Fabrication- The science of miniaturization,
- Nanogen Corporation, USA, CRC press, March 2002.
- Sergey Edward Lyshevski: Nano-And Micro Electro Mechanical Systems, Second edition, CRC press, Boca Ratron London.
- Jan G Korvinik and Oliver Paul, MEMS Practical Guide to Design, analysis and Applications William Andrew, Inc Springer
- G. K. Anantsuresh, K.J. Vinoy, S. Gopalkrishnan, K.N. Bhat, V.K. Atare, Micro and Smart Systems Wiley.
For detail syllabus of all subjects of Electronics & Telecommunication Engineering (ET) 5th Sem 2017 onwards, visit ET 5th Sem Subjects of 2017 Onwards.