BMC801: Biomedical Microsystems Syllabus for BM 8th Sem 2019 Pattern Mumbai University

Biomedical Microsystems detailed syllabus scheme for Biomedical Engineering (BM), 2019 regulation has been taken from the University of Mumbai official website and presented for the Bachelor of Engineering students. For Course Code, Course Title, Test 1, Test 2, Avg, End Sem Exam, Team Work, Practical, Oral, Total, and other information, do visit full semester subjects post given below.

For all other Mumbai University Biomedical Engineering 8th Sem Syllabus 2019 Pattern, do visit BM 8th Sem 2019 Pattern Scheme. The detailed syllabus scheme for biomedical microsystems is as follows.

Biomedical Microsystems Syllabus for Biomedical Engineering BE 8th Sem 2019 Pattern Mumbai University

Course Objectives:

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Course Outcomes:

Learner will be able to

• Understand basic property and select appropriate material for MEMS application
• Develop or modify the MEMS processes for a simple MEMS device in order to reduce the fabrication time.
• Understand different microfabrication techniques and choose appropriate technique
• Analyze Micro total analysis system with designing of its components
• Demonstrate working principles of Bio Nano-sensors and drug delivery devices with types and fabrication
• Understand packaging techniques used in MEMS

Module 1

Introduction to miniaturization and materials

• Block diagram of MEMS and BIOMEMS, comparison, examples
• Clean room: definition, classification, air flow system
• Safety in handling hazardous materials in clean room
• Scaling Laws in Miniaturization
• Substrates and Wafers: CZ process, wafer types
• Materials: Properties and applications of single crystal silicon, SiO2, Si3N4, SiC, Polysilicon, GaAs, Glass, Al, Gold, PMMA, PDMS, SU8, Conducting polymers 08

Module 2

MEMS FABRICATION PROCESSES

• Wafer cleaning processes: RCA, Piranha
• PVD: definition, Types: Evaporation (Thermal and E-beam) and Sputtering (DC and RF), applicable materials, advantages, disadvantages
• CVD: definition, reaction steps, types: APCVD, LPCVD, PECVD, and HWCVD, applicable materials, advantages, disadvantages
• Oxidation: Thermal
• Polymers coating techniques: spinning, spraying and electrodeposition
• Doping: definition, Types: Ion implantation and Diffusion, advantages, disadvantages
• Etching: Types: Dry etching (RIE, DRIE) and wet etching (isotropic and anisotropic), advantages, disadvantages, specific etchants
• Photolithography: Definition, steps, light sources (UV, DUV, and EUV), positive and negative photoresist, mask, different projection systems
• X-ray lithography: Synchrotron radiation, X-ray mask
• Nanolithography: EBL
• Surface characterization techniques: AFM, SEM, TEM, Ellipsometer, Profilometer 12

Module 3

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Module 4

MICRO TOTAL ANALYSIS SYSTEMS (iiTAS)

• Basic block diagram 08
• Flow techniques in p-fluidics: pressure driven force, electro-osmosis, electrophoresis
• Micropump, microvalves: types and fabrication
• Microchannels: Types and fabrication (SU8, glass, silicon)
• Separation techniques: capillary electropherosis, electrochromatography, isoelectric focusing Detection techniques: fluorescence, chemiluminiscence

Module 5

MICRO/ NANO BIOSENSORS AND DRUG DELIVERY DEVICES

• Biosensor: definition, block diagram
• Classification based on the basis of detection techniques: Electric, Magnetic, Optical, Thermal, Mechanical, and Chemical
• Basic steps involved in the development of biosensors: surface modification, immobilization, integration with transducer
• Design, fabrication of cantilever for antibody detection
• Hypodermic needles, transdermal patches : disadvantages
• Micro needles: solid, hollow, polymer, silicon (fabrication) Nano particles for drug delivery 10

Module 6

MICROSYSTEM PACKAGING

• Packaging materials
• Levels of packaging
• Comparison between IC and MEMS packaging
• Packaging technologies: Die preparation, surface bonding, wire bonding, sealing
• Pressure sensor packaging 06

Assessment:

For the complete Syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdf platform to make students’s lives easier.
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Text Books:

1. MEMS & MICROSYSTEMS Design and Manufacture, Tai-Ran Hsu, TATA Mcgraw-HILL.
2. Fundamentals of Microfabrication Marc Madou, CRC Press.

Reference Books:

1. Fundamentals of BioMEMS and Medical Microdevices, Steven S. Saliterman, (SPIE Press Monograph Vol. PM153 by Wiley Interscience
2. Microsystem Technology, W. Menz, J. Mohr,
3. Paul, WILEY-VCH, ISBN 3-527-29634-4
4. Electro Mechanical System Design, James J. Allen, Taylor & Francis Group, LLC, ISBN-08247-5824-2, 2005
5. MICROSYSTEM DESIGN,Stephen D. Senturia, KLUWER ACADEMIC PUBLISHERS, eBook ISBN: 0-306-47601-0
6. Introduction to Microfabrication, Sami FranssilaJohn Wiley & Sons Ltd, ISBN 0-47085106-6
7. Microelectromechanical Systems, Nicolae Lobontiu, Ephrahim Garcia, KLUWER ACADEMIC PUBLISHERS, eBook ISBN: 0-387-23037-8
8. BIOMEDICAL NANOTECHNOLOGY, Neelina H. MalschCRC PRESS, Taylor and Francis Group, ISBN 10: 0-8247-2579-4

Theory Examination:

1. Question paper will comprise of total 06 questions, each carrying 20 marks.
2. Total 04 questions need to be solved.
3. Question No: 01 will be compulsory and based on entire syllabus wherein sub-questions of marks will be asked.
4. Remaining questions will be randomly selected from all the modules.

For detail syllabus of all other subjects of Biomedical Engineering (BM) 8th Sem 2019 regulation, visit BM 8th Sem Subjects syllabus for 2019 regulation.