MEMS & Micro Systems : Design & Manufacture Detailed Syllabus for Design For Manufacturing\/ Design And Manufacturing M.Tech first year first sem is covered here. This gives the details about credits, number of hours and other details along with reference books for the course.<\/p>\n
The detailed syllabus for MEMS & Micro Systems : Design & Manufacture M.Tech 2017-2018 (R17) first year first sem is as follows.<\/p>\n
M.Tech. I Year I Sem.<\/p>\n
UNIT \u2013 I:<\/strong> Overview and Working Principles of Mems and Microsystems:<\/strong> MEMS & Microsystems, Evolution of Micro fabrication, Microsystems & Microelectronics, Microsystems & Miniaturization, Applications of MEMS in Industries, Micro sensors, Micro actuation, MEMS with Micro actuators Micro accelerometers, Micro fluidics.<\/p>\n UNIT \u2013 II: Engineering Science for Microsystems Design and Fabrication:<\/strong> Atomic structure of Matter, Ions UNIT \u2013 III: Engineering Mechanics for Microsystems Design:<\/strong> Static Bending of Thin Plates, Mechanical Vibration, Thermo mechanics Fracture Mechanics, Thin-Film Mechanics, Overview of Finite Element Stress Analysis<\/p>\n UNIT \u2013 IV: Thermo Fluid Engineering & Microsystems Design:<\/strong> Overview of Basis of Fluid Mechanics in Macro and Mesoscales, Basic equations in Continuum Fluid Dynamics, Laminar Fluid Flow in Circular Conduits, Computational Fluid Dynamics, Incompressible Fluid Flow in Micro conduits, Fluid Flow in Sub micrometer and Nanoscale, Overview of Heat conduction in Solids, Heat conduction in Multilayered Thin films and in solids in sub micrometer scale, Design Considerations, Process Design Mechanical Design, Mechanical Design using FEM, Design of a Silicon Die for a Micro pressure Sensor<\/p>\n UNIT \u2013 V: Materials for Mems & Microsystems and Their Fabrication:<\/strong> Substrates and Wafers, Active\u00a0 substrate materials, Silicon as a substrate material, Silicon Compounds, Silicon Piezoresistors, Gallium Arsenide, Quartz, Piezoelectric Crystals and Polymers, Photolithography, Ion implantation, Diffusion and oxidation, Chemical and physical vapor deposition, Etching, Bulk micro manufacturing, Surface Micromachining, The LIGA Process.<\/p>\n REFERENCES:<\/strong><\/p>\n
\nand Ionization, Molecular Theory of Matter and Intermolecular Forces, Doping of Semiconductors, The Diffusion Process, Plasma Physics, Electrochemistry, Quantum Physics<\/p>\n\n