MEMS Design detailed syllabus for Mechatronics Engineering (MECHATRONICS), R18 regulation has been taken from the JNTUHs official website and presented for the students of B.Tech Mechatronics Engineering branch affiliated to JNTUH course structure. For Course Code, Course Titles, Theory Lectures, Tutorial, Practical/Drawing, Credits, and other information do visit full semester subjects post given below. The syllabus PDF files can also be downloaded from the universities official website.
For all the other MECHATRONICS 4th Year 2nd Sem Syllabus for B.Tech R18 Regulation JNTUH scheme, visit Mechatronics Engineering 4th Year 2nd Sem R18 Scheme.
For all the (Professional Elective-5) subjects refer to Professional Elective-5 Scheme. The detail syllabus for mems design is as follows.
Unit – I
Introduction, Integrated Circuits, MEMs, Micro sensors, Micro actuators, Microelectronics, Fabrication, micromachining, Mechanical MEMS, Thermal MEMs, MOEMS, Magnetic MEMEs, RF MEMS, Micro fluid systems, Bio and thermo-devices, Nanotechnology, Modeling, Simulation. Micromachining: Introduction, Photolithography, Structural and sacrificial materials, other lithography methods, Thin film deposition, impurity doping, etching, Problems with bulk Micro Machining, Surface Machining, Bulks.
Unit – II
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Unit – III
Mechanical Sensors and Actuators: Introduction, Principles of sensing and actuation, Beam and cantilever, Micro plates, captive Effects, Piezo Electric Material as sensing and actuating elements, strain measurement, pressure measurements, flow measurement using integrated paddle cantilever structure. Thermal sensors and actuators: Introduction, Thermal energy basics and heat transfer process, Thermistors, Thermo devices, Thermocouple, Micro machined thermocouple probe, Peltier effect heat pumps, Thermal flow sensors, Microhot plate gas sensors, shape memory Alloys, U-shaped horizontal and vertical Electrothermal Actuators, Thermally activated MEMEs relay.
Unit – IV
Micro-Opto-Electromechanical systems: Introduction, fundamental principle of MOEMs Technology, Review on properties of light, Light Modulators, beam Splitters, Microlense, Micro mirrors, digital micromirror device, light detectors, grating light valve, optical switch, waveguide and tuning, shear Stress measurement, Magnetic Sensors and actuators.
Unit – V
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Text Books:
- MEMS, Nitaigour Premchand Mahalik, TMH.
- MEMS and Micro Systems design and Manufacture, Tai-ran HSU, TMH, 2006.
Reference Books:
- Mechatronics Systems Fundamentals-Rolf Isermann-Springer International Edition.
- The science and engineering of Micro Electronic Fabrication, 2nd ed. By. S.A. Cambell, Published by Oxford University Press (2001).
- Fundamentals of Micro Fabrication: The science of Miniaturization, 2nd Edition by M.J. Madou, published by CRC Press (2002).
- Introductory MEMS: Fabrication and application by Adams, Thomas M. Layton Richard A., 1st Edition 2010 IBNL 978-0-387-09510-3, Springer.
- Microsystems Design, Stephen D.Senturia, Springer International Edition.
For detail syllabus of all other subjects of B.Tech Mechatronics Engineering 4th Year 2nd Sem , visit MECHATRONICS 4th Year 2nd Sem syllabus subjects.
For B.Tech Mechatronics Engineering (MECHATRONICS) 4th Year results, visit JNTUH B.Tech Mechatronics Engineering semester results direct link.