MEMS detailed syllabus for Mechanical Engineering (ME), R18 regulation has been taken from the JNTUHs official website and presented for the students of B.Tech Mechanical Engineering branch affiliated to JNTUH course structure. For Course Code, Course Titles, Theory Lectures, Tutorial, Practical/Drawing, Credits, and other information do visit full semester subjects post given below. The syllabus PDF files can also be downloaded from the universities official website.
For all the other ME 4th Year 1st Sem Syllabus for B.Tech R18 Regulation JNTUH scheme, visit Mechanical Engineering 4th Year 1st Sem R18 Scheme.
For all the (Professional Elective-2) subjects refer to Professional Elective-2 Scheme. The detail syllabus for mems is as follows.
Pre-requisites:
Fluid Mechanics
Course Objective:
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Course Outcome:
- Students will be able to understand working principles of currently available micro sensors, actuators, and motors, valves, pumps, and fluidics used in Microsystems.
- Students will be able to apply scaling laws that are used extensively in the conceptual design of micro devices and systems. Students will be able to differentiate between the positive and negative consequences of scaling down certain physical quantities that are pertinent to Microsystems.
- Students will be able to use materials for common micro components and devices.
- Students will be able to choose a micromachining technique, such as bulk micromachining and surface micromachining for a specific MEMS fabrication process.
- Students will be able to understand the basic principles and applications of micro-fabrication processes, such as photolithography, ion implantation, diffusion, oxidation, CVD, PVD, and etching.
- Students will be able to consider recent advancements in the field of MEMS and devices.
- Students will be able communicate their results and findings orally via formal presentations and in writing through reports.
Unit – I
Introduction to MEMS and Micro fabrication: MEMS Roadmap MEMS markets-MEMS foundries-Benefits of Miniaturization -Benefits of Scaling. Micro fabrication: Basic Fabrication Processes-oxidation -film deposition lithography-etching-ion implantation- diffusion.
Unit – II
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Unit – III
Mechanics of MEMS Materials: Stress-strain-material properties-measurement and characterization of mechanical parameters. Microstructural Elements: bending moment and strain-flexural rigidityresidual stress boundary conditions-spring combinations.
Unit – IV
MEMS Devices: Pressure sensors-Accelerometers-Gyroscopes-RF MEMS Switch-Temperature sensors Humidity sensors. Microactuators: Electrostatic-piezoelectric-SMA-Thermoelectric-electromagnetic.
Unit – V
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Text Books:
- MEMS and Microsystems Design and Manufacture/ Tai-Ran Hsu/ Tata Mc Graw Hill
- Microelectromechanical Systems / Bhattacharyya / Cengage
Reference Books:
For the complete syllabus, results, class timetable, and many other features kindly download the iStudy App
It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier..
For detail syllabus of all other subjects of B.Tech Mechanical Engineering 4th Year 1st Sem , visit ME 4th Year 1st Sem syllabus subjects.
For B.Tech Mechanical Engineering (ME) 4th Year results, visit JNTUH B.Tech Mechanical Engineering semester results direct link.