MEMS and Applications Detailed Syllabus for Electronics & Instrumentation M.Tech first year second sem is covered here. This gives the details about credits, number of hours and other details along with reference books for the course.
The detailed syllabus for MEMS and Applications M.Tech 2017-2018 (R17) first year second sem is as follows.
M.Tech. I Year II Sem.
UNIT – I : Introduction to MEMS: MEMS, Use of MEMS, Fabrication process. The Substrate and adding material to it: Introduction, The silicon substrate, Additive technique Oxidation, Additive technique- Physical vapor deposition, other additive techniques.
UNIT – II : MEMS Fabrication: Creating and transferring patterns: Photolithography- Introduction, Keeping it clean, Photoresist, Working with resist, Masks, Resolution, Permanent resists. Creating structures-Micromachining: Introduction, Bulk Micromachining processes, Surface Micromachining, Process Integration.
UNIT – III : MEMS Transducers – I: Modelling: Units, The input-output concept, Physical variables and notation, Preface to the modeling chapters. MEMS Transducers: An overview-Transducer, Distinguishing between sensors and actuators, Response characteristics of transducers, MEMS Sensors- Principles of operation, MEMS Actuators Principles of operation, Signal conditioning, RF applications and Optical applications. Piezoresistive Transducers: Introduction, Modeling Piezoresistive transducers, Piezoresistive pressure sensor.
UNIT – IV : MEMS Transducers – II: Capacitive Transducers: Introduction, Capacitor fundamentals, Modeling a capacitor sensor, Capacitive accelerometer.
UNIT – V : MEMS Transducers – III: Piezoelectric Transducers: Introduction, Modeling piezoelectric materials, Mechanical modelling of beams and plates, Cantilever piezoelectric actuator. Thermal Transducers: Introduction, Basic heat transfer, Hot-arm actuator.
TEXT BOOKS:
- Adams, Thomas M., Layton, Richard A., “Introductory MEMS Fabrication and Applications”, Springer.
REFERENCE BOOKS:
- Tai-Ran Hsu, “MEMS and Microsystems- Design and Manufacture”, McGraw-Hill, 2002.
- Mohamed Gad-el-Hak, “MEMS-Applications”, CRC Press, 29-Nov-2005
For all other M.Tech 1st Year 2nd Sem syllabus go to JNTUH M.Tech Electronics & Instrumentation 1st Year 2nd Sem Course Structure for (R17) Batch.
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