{"id":591,"date":"2016-11-08T18:00:40","date_gmt":"2016-11-08T18:00:40","guid":{"rendered":"http:\/\/www.inspirenignite.com\/anna-university\/?p=591"},"modified":"2019-07-17T08:18:39","modified_gmt":"2019-07-17T08:18:39","slug":"anna-university-b-tech-me-r13-7th-sem-micro-electro-mechanical-systems-detailed-syllabus","status":"publish","type":"post","link":"https:\/\/www.inspirenignite.com\/anna-university\/anna-university-b-tech-me-r13-7th-sem-micro-electro-mechanical-systems-detailed-syllabus\/","title":{"rendered":"Anna University B.Tech ME (R13) 7th Sem Micro Electro Mechanical Systems Detailed Syllabus"},"content":{"rendered":"<p>Micro Electro Mechanical Systems Syllabus for B.Tech 7th sem is covered here. This gives the details about credits, number of hours and other details along with reference books for the course.<\/p>\n<p>The detailed syllabus for Micro Electro Mechanical Systems B.Tech (R13) seventhsem is as follows<\/p>\n<p><strong>OBJECTIVES<\/strong><\/p>\n<ul>\n<li>To provide knowledge of semiconductors and solid mechanics to fabricate MEMS devices.<\/li>\n<li>\u00a0To educate on the rudiments of Micro fabrication techniques.<\/li>\n<li>To introduce various sensors and actuators<\/li>\n<li>To introduce different materials used for MEMS<\/li>\n<li>To educate on the applications of MEMS to disciplines beyond Electrical and Mechanical\u00a0engineering.<\/li>\n<\/ul>\n<p><strong>UNIT I : INTRODUCTION \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0<\/strong> [9 hours]<br \/>\nIntrinsic Characteristics of MEMS \u2013 Energy Domains and Transducers- Sensors and Actuators \u2013 Introduction to Micro fabrication &#8211; Silicon based MEMS processes \u2013 New Materials \u2013 Review of Electrical and Mechanical concepts in MEMS \u2013 Semiconductor devices \u2013 Stress and strain analysis \u2013 Flexural beam bending- Torsional deflection.<\/p>\n<p><strong>UNIT II : SENSORS AND ACTUATORS-I<\/strong> \u00a0 \u00a0 \u00a0 \u00a0 \u00a0 \u00a0[9 hours]<br \/>\nElectrostatic sensors \u2013 Parallel plate capacitors \u2013 Applications \u2013 Interdigitated Finger capacitor \u2013 Comb drive devices \u2013 Micro Grippers \u2013 Micro Motors &#8211; Thermal Sensing and Actuation \u2013 Thermal expansion \u2013 Thermal couples \u2013 Thermal resistors \u2013 Thermal Bimorph &#8211; Applications \u2013 Magnetic Actuators \u2013 Micromagnetic components \u2013 Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys<\/p>\n<p><strong>UNIT III : SENSORS AND ACTUATORS-II \u00a0<\/strong> \u00a0 \u00a0 \u00a0\u00a0[9 hours]<br \/>\nPiezoresistive sensors \u2013 Piezoresistive sensor materials &#8211; Stress analysis of mechanical elements \u2013 Applications to Inertia, Pressure, Tactile and Flow sensors \u2013 Piezoelectric sensors and actuators \u2013 piezoelectric effects \u2013 piezoelectric materials \u2013 Applications to Inertia , Acoustic, Tactile and Flow sensors.<\/p>\n<p style=\"text-align: center\"><strong><a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">Download iStudy<\/a> <a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">Android<\/a><a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\"> App for complete Anna University syllabus, results, timetables and all other updates. There are no ads and no pdfs and will make your life way easier.<\/a><\/strong><\/p>\n<p><strong>TOTAL : 45 PERIODS <\/strong><\/p>\n<p><strong>OUTCOMES<\/strong><\/p>\n<ul>\n<li>Ability to understand and apply basic science, circuit theory, Electro-magnetic field theory control theory and apply them to electrical engineering problems.<\/li>\n<li>Ability to understand and analyse, linear and digital electronic circuits.<\/li>\n<\/ul>\n<p><strong>TEXT BOOKS:<\/strong><\/p>\n<ul>\n<li>Chang Liu, &#8220;Foundations of MEMS&#8221;, Pearson Education Inc., 2006.<\/li>\n<li>Stephen D Senturia, &#8220;Microsystem Design&#8221;, Springer Publication, 2000.<\/li>\n<li>Tai Ran Hsu, \u201cMEMS &amp; Micro systems Design and Manufacture\u201d Tata McGraw Hill, New Delhi, 2002.<\/li>\n<\/ul>\n<p><strong>REFERENCES:<\/strong><\/p>\n<ul>\n<li>Nadim Maluf,\u201c An Introduction to Micro Electro Mechanical System Design\u201d, Artech House, 2000.<\/li>\n<li>Mohamed Gad-el-Hak, editor, \u201c The MEMS Handbook\u201d, CRC press Baco Raton, 2000<\/li>\n<li>Julian w. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, &#8220;Micro Sensors MEMS and Smart Devices&#8221;, John Wiley &amp; Son LTD,2002<\/li>\n<li>James J.Allen, &#8220;Micro Electro Mechanical System Design&#8221;, CRC Press Publisher, 2010<\/li>\n<li>Thomas M.Adams and Richard A.Layton, \u201cIntroduction MEMS, Fabrication and Application,\u201d Springer 2012.<\/li>\n<\/ul>\n<p>For all other B.Tech ME 7th sem syllabus go to <a href=\"http:\/\/www.inspirenignite.com\/anna-university\/anna-university-b-tech-mechanical-engineering-7th-sem-course-structure-for-r13-batch\/\">Anna University B.Tech Mechanical Engineering (ME) 7th Sem Course Structure for (R13) Batch<\/a>.All details and yearly new syllabus will be updated here time to time. Subscribe, like us on facebook and follow us on google plus for all updates.<\/p>\n<p>Do share with friends and in case of questions please feel free drop a comment.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Micro Electro Mechanical Systems Syllabus for B.Tech 7th sem is covered here. This gives the details about credits, number of hours and other details along with reference books for the [&hellip;]<\/p>\n","protected":false},"author":2259,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_bbp_topic_count":0,"_bbp_reply_count":0,"_bbp_total_topic_count":0,"_bbp_total_reply_count":0,"_bbp_voice_count":0,"_bbp_anonymous_reply_count":0,"_bbp_topic_count_hidden":0,"_bbp_reply_count_hidden":0,"_bbp_forum_subforum_count":0,"footnotes":""},"categories":[1],"tags":[],"class_list":["post-591","post","type-post","status-publish","format-standard","hentry","category-uncategorized"],"_links":{"self":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts\/591","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/users\/2259"}],"replies":[{"embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/comments?post=591"}],"version-history":[{"count":2,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts\/591\/revisions"}],"predecessor-version":[{"id":10698,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts\/591\/revisions\/10698"}],"wp:attachment":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/media?parent=591"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/categories?post=591"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/tags?post=591"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}