{"id":57793,"date":"2023-09-02T16:48:58","date_gmt":"2023-09-02T16:48:58","guid":{"rendered":"https:\/\/www.inspirenignite.com\/anna-university\/cmr356-micro-electro-mechanical-systems-syllabus-for-mae-2021-regulation-professional-elective-vii\/"},"modified":"2023-09-02T16:48:58","modified_gmt":"2023-09-02T16:48:58","slug":"cmr356-micro-electro-mechanical-systems-syllabus-for-mae-2021-regulation-professional-elective-vii","status":"publish","type":"post","link":"https:\/\/www.inspirenignite.com\/anna-university\/cmr356-micro-electro-mechanical-systems-syllabus-for-mae-2021-regulation-professional-elective-vii\/","title":{"rendered":"CMR356: Micro Electro Mechanical Systems syllabus for MAE 2021 regulation (Professional Elective-VII)"},"content":{"rendered":"

Micro Electro Mechanical Systems detailed syllabus for Mechanical & Automation Engineering (MAE) for 2021 regulation curriculum has been taken from the Anna Universities<\/a> official website and presented for the MAE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below. <\/p>\n

For Mechanical & Automation Engineering 6th Sem scheme and its subjects, do visit MAE 6th Sem 2021 regulation scheme<\/a>. For Professional Elective-VII scheme and its subjects refer to MAE Professional Elective-VII syllabus scheme<\/a>. The detailed syllabus of micro electro mechanical systems is as follows. <\/p>\n

Course Objectives:<\/h4>\n

Download the iStudy App for all syllabus and other updates.<\/a>
\"Get<\/a><\/h4>\n

Unit I<\/h4>\n

INTRODUCTION\t9<\/strong>
\nIntrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators -Introduction to Micro fabrication – Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices -Polymers in MEMS-Polyamide – SU-8 – Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon.\n<\/p>\n

Unit II<\/h4>\n

SENSORS\t9<\/strong>
\nCharacteristics of sensors – Electrostatic sensors – Parallel plate capacitors – Piezoresistive sensors – Piezoresistive sensor materials – Stress and strain analysis – Flexural beam bending – Torsional deflection- Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials\n<\/p>\n

Unit III<\/h4>\n

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Unit IV<\/h4>\n

MICROMACHINING\t9
\nSilicon Anisotropic Etching – Anisotropic Wet Etching – Dry Etching of Silicon – Plasma Etching- Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants – Case studies – Basic surface micro machining processes – Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antirestriction methods – LIGA Process – Assembly of 3D MEMS – Foundry process\n<\/p>\n

Unit V<\/h4>\n

APPLICATIONS OF MEMS INERTIAL SENSORS\t9<\/strong>
\nApplication to Acceleration, Inertia, Acoustic, Tactile, Pressure, Flow and Tactile sensors- Optical MEMS -Lenses and Mirrors -Actuators for Active Optical MEMS.- RF MEMS and Microfluidics.\n<\/p>\n

Course Outcomes:<\/h4>\n

Upon successful completion of the course, students should be able to:<\/p>\n

    \n
  1. Recognize MEMS Energy Domains and Transducers, Sensors and Actuators.<\/li>\n
  2. Select the Various MEMS sensors and its Stress and strain<\/li>\n
  3. Apply various MEMS actuators in Real time system.<\/li>\n
  4. Demonstrate various micro machining processes, Structural and Sacrificial Materials<\/li>\n
  5. Analyze the various MEMS inertial, tactile, pressure and flow sensors in real time system<\/li>\n<\/ol>\n

    Text Books:<\/h4>\n

    Download the iStudy App for all syllabus and other updates.<\/a>
    \"Get<\/a><\/h4>\n

    Reference Books:<\/h4>\n
      \n
    1. James J.Allen, “Micro Electro Mechanical System Design”, CRC Press Publisher, 2010<\/li>\n
    2. Julian w. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, “Micro Sensors MEMS and Smart Devices”, John Wiley & Son LTD,2002<\/li>\n
    3. Mohamed Gad-el-Hak, editor, \u201c The MEMS Handbook\u201d, CRC press Baco Raton, 2000<\/li>\n
    4. Nadim Maluf,\u201c An Introduction to Micro Electro Mechanical System Design\u201d, Artech House, 2000.<\/li>\n
    5. Thomas M.Adams and Richard A.Layton, \u201cIntroduction MEMS, Fabrication and Application,\u201d Springer 201<\/li>\n<\/li>\n<\/ol>\n

      For detailed syllabus of all the other subjects of Mechanical & Automation Engineering 6th Sem, visit MAE 6th Sem subject syllabuses for 2021 regulation<\/a>. <\/p>\n

      For all Mechanical & Automation Engineering results, visit Anna University MAE all semester results<\/a> direct link. <\/p>\n","protected":false},"excerpt":{"rendered":"

      Micro Electro Mechanical Systems detailed syllabus for Mechanical & Automation Engineering (MAE) for 2021 regulation curriculum has been taken from the Anna Universities official website and presented for the MAE […]<\/p>\n","protected":false},"author":2297,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_bbp_topic_count":0,"_bbp_reply_count":0,"_bbp_total_topic_count":0,"_bbp_total_reply_count":0,"_bbp_voice_count":0,"_bbp_anonymous_reply_count":0,"_bbp_topic_count_hidden":0,"_bbp_reply_count_hidden":0,"_bbp_forum_subforum_count":0,"footnotes":""},"categories":[160],"tags":[],"class_list":["post-57793","post","type-post","status-publish","format-standard","hentry","category-mae"],"_links":{"self":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts\/57793","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/users\/2297"}],"replies":[{"embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/comments?post=57793"}],"version-history":[{"count":0,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts\/57793\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/media?parent=57793"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/categories?post=57793"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/tags?post=57793"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}