{"id":34145,"date":"2021-05-22T11:25:39","date_gmt":"2021-05-22T11:25:39","guid":{"rendered":"https:\/\/www.inspirenignite.com\/anna-university\/ml5009-mems-and-micro-fabrication-syllabus-for-mse-6th-sem-2019-regulation-anna-university-professional-elective-iii\/"},"modified":"2021-05-22T11:25:39","modified_gmt":"2021-05-22T11:25:39","slug":"ml5009-mems-and-micro-fabrication-syllabus-for-mse-6th-sem-2019-regulation-anna-university-professional-elective-iii","status":"publish","type":"post","link":"https:\/\/www.inspirenignite.com\/anna-university\/ml5009-mems-and-micro-fabrication-syllabus-for-mse-6th-sem-2019-regulation-anna-university-professional-elective-iii\/","title":{"rendered":"ML5009: MEMS and Micro Fabrication Syllabus for MSE 6th Sem 2019 Regulation Anna University (Professional Elective-III)"},"content":{"rendered":"

MEMS and Micro Fabrication detailed syllabus for Materials Science & Engineering (MSE) for 2019 regulation curriculum has been taken from the Anna Universities<\/a> official website and presented for the MSE students. For course code, course name, number of credits for a course and other scheme related information, do visit full semester subjects post given below. <\/p>\n

For Materials Science & Engineering 6th Sem scheme and its subjects, do visit MSE 6th Sem 2019 regulation scheme<\/a>. For Professional Elective-III scheme and its subjects refer to MSE Professional Elective-III syllabus scheme<\/a>. The detailed syllabus of mems and micro fabrication is as follows. <\/p>\n

MEMS and Micro Fabrication<\/title><\/p>\n<h4>Course Objective:<\/h4>\n<p id=\"istudy\" style=\"text-align:center\">For the complete syllabus, results, class timetable, and many other features kindly download the <a class=\"rank-math-link\" href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">iStudy App<\/a><br \/><b> It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier.<\/b><br \/><a class=\"rank-math-link\" href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy&pcampaignid=pcampaignidMKT-Other-global-all-co-prtnr-py-PartBadge-Mar2515-1\" target=\"_blank\" rel=\"noopener\"><img decoding=\"async\" src=\"https:\/\/play.google.com\/intl\/en_us\/badges\/static\/images\/badges\/en_badge_web_generic.png\" alt=\"Get it on Google Play\" style=\"height:65px\"><\/a>. <\/p>\n<h4>Unit I<\/h4>\n<p align=\"justify\">\n <strong>Material Aspects of Mems and Nems<\/strong><br \/>\n Overview of MEMS and NEMS. Material Aspects – Silicon and its compounds – Thin metal films – semiconductor – optical properties – Polymers – Smart materials.\n<\/p>\n<h4>Unit II<\/h4>\n<p id=\"istudy\" style=\"text-align:center\">For the complete syllabus, results, class timetable, and many other features kindly download the <a class=\"rank-math-link\" href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">iStudy App<\/a><br \/><b> It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier.<\/b><br \/><a class=\"rank-math-link\" href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy&pcampaignid=pcampaignidMKT-Other-global-all-co-prtnr-py-PartBadge-Mar2515-1\" target=\"_blank\" rel=\"noopener\"><img decoding=\"async\" src=\"https:\/\/play.google.com\/intl\/en_us\/badges\/static\/images\/badges\/en_badge_web_generic.png\" alt=\"Get it on Google Play\" style=\"height:65px\"><\/a>. <\/p>\n<h4>Unit III<\/h4>\n<p align=\"justify\">\n <strong>Micromanufacturing Processes<\/strong><br \/>\n Thin films – Physical deposition: Evaporation and sputtering – Chemical Vapor Deposition -Epitaxial growth. Etching – Isotropic etching – Anisotropic etching – Deep Reactive ion etching (DRIE). Surface micromachining, Bulk Micro-manufacturing, LIGA Process.\n<\/p>\n<h4>Unit IV<\/h4>\n<p id=\"istudy\" style=\"text-align:center\">For the complete syllabus, results, class timetable, and many other features kindly download the <a class=\"rank-math-link\" href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">iStudy App<\/a><br \/><b> It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier.<\/b><br \/><a class=\"rank-math-link\" href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy&pcampaignid=pcampaignidMKT-Other-global-all-co-prtnr-py-PartBadge-Mar2515-1\" target=\"_blank\" rel=\"noopener\"><img decoding=\"async\" src=\"https:\/\/play.google.com\/intl\/en_us\/badges\/static\/images\/badges\/en_badge_web_generic.png\" alt=\"Get it on Google Play\" style=\"height:65px\"><\/a>. <\/p>\n<h4>Unit V<\/h4>\n<p align=\"justify\">\n <strong>Mems and Nems Applications<\/strong><br \/>\n Applications in Computer industry – Making of ICs and Microprocessors – Data storage devices. Automobile – Safety and Stability Control. Health care – Lab-on-a-Chip. Consumer Products; Micro reactor; Micro-bots; MOEMS; Molecular machines.\n<\/p>\n<h4>Course Outcome:<\/h4>\n<p id=\"istudy\" style=\"text-align:center\">For the complete syllabus, results, class timetable, and many other features kindly download the <a class=\"rank-math-link\" href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">iStudy App<\/a><br \/><b> It is a lightweight, easy to use, no images, and no pdfs platform to make students’s lives easier.<\/b><br \/><a class=\"rank-math-link\" href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy&pcampaignid=pcampaignidMKT-Other-global-all-co-prtnr-py-PartBadge-Mar2515-1\" target=\"_blank\" rel=\"noopener\"><img decoding=\"async\" src=\"https:\/\/play.google.com\/intl\/en_us\/badges\/static\/images\/badges\/en_badge_web_generic.png\" alt=\"Get it on Google Play\" style=\"height:65px\"><\/a>. <\/p>\n<h4>Text Books:<\/h4>\n<p align=\"justify\">\n<ol>\n<li>Stephen A.Campbell, “Fabrication Engineering at the micro and nano scale”, Oxford University Press, 4th edition, 2013.<\/li>\n<li>Tai-Ran Hsu, “MEMS and Micro systems Design and Manufacture”, McGraw Hill Education, 2015.<\/li>\n<\/ol>\n<h4>References:<\/h4>\n<p align=\"justify\">\n<ol>\n<li>Bharat Bhushan, “Handbook of Nanotechnology”, Springer, 2006.<\/li>\n<li>Maria Stepanova and Stephen Dew, “Nanofabrication: Techniques and Principles”, Springer, 2011.<\/li>\n<li>Marc Madou, “Fundamentals of Microfabrication”, CRC Press, 2002.<\/li>\n<li>Mark A. Ratner and Daniel Ratner, “Nanotechnology: A Gentle Introduction to the Next Big Idea, Pearson, 2003.<\/li>\n<li>Stephen D Senturia, “Microsystem Design”, Kluwer Academic Publishers, 2002.<\/li>\n<\/ol>\n<p align=\"justify\">For detailed syllabus of all the other subjects of Materials Science & Engineering 6th Sem, visit <a class=\"rank-math-link\" href=\"..\/category\/mse+6th-sem\">MSE 6th Sem subject syllabuses for 2019 regulation<\/a>. <\/p>\n<p align=\"justify\">For all Materials Science & Engineering results, visit <a class=\"rank-math-link\" href=\"https:\/\/www.inspirenignite.com\/anna-university\/anna-university-results\/\">Anna University MSE all semester results<\/a> direct link. <\/p>\n","protected":false},"excerpt":{"rendered":"<p>MEMS and Micro Fabrication detailed syllabus for Materials Science & Engineering (MSE) for 2019 regulation curriculum has been taken from the Anna Universities official website and presented for the MSE […]<\/p>\n","protected":false},"author":2297,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_bbp_topic_count":0,"_bbp_reply_count":0,"_bbp_total_topic_count":0,"_bbp_total_reply_count":0,"_bbp_voice_count":0,"_bbp_anonymous_reply_count":0,"_bbp_topic_count_hidden":0,"_bbp_reply_count_hidden":0,"_bbp_forum_subforum_count":0,"footnotes":""},"categories":[58],"tags":[],"class_list":["post-34145","post","type-post","status-publish","format-standard","hentry","category-materials"],"_links":{"self":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts\/34145","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/users\/2297"}],"replies":[{"embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/comments?post=34145"}],"version-history":[{"count":0,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts\/34145\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/media?parent=34145"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/categories?post=34145"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/tags?post=34145"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}