{"id":19757,"date":"2019-12-10T06:10:54","date_gmt":"2019-12-10T06:10:54","guid":{"rendered":"https:\/\/www.inspirenignite.com\/anna-university\/mems-and-nano-science-ice-6th-sem-syllabus-for-be-2017-regulation-anna-univ-professional-elective-i\/"},"modified":"2019-12-10T06:10:54","modified_gmt":"2019-12-10T06:10:54","slug":"mems-and-nano-science-ice-6th-sem-syllabus-for-be-2017-regulation-anna-univ-professional-elective-i","status":"publish","type":"post","link":"https:\/\/www.inspirenignite.com\/anna-university\/mems-and-nano-science-ice-6th-sem-syllabus-for-be-2017-regulation-anna-univ-professional-elective-i\/","title":{"rendered":"Mems and Nano Science Ice 6th Sem Syllabus for BE 2017 Regulation Anna Univ (Professional Elective I)"},"content":{"rendered":"<p>Mems and Nano Science Ice 6th Sem Syllabus for BE 2017 Regulation Anna Univ (Professional Elective I) detail syllabus for Instrumentation &amp; Control Engineering (Ice), 2017 regulation is collected from the <a href=\"https:\/\/www.annauniv.edu\/\" target=\"_blank\" rel=\"noopener\">Anna Univ<\/a> official website and presented for students of Anna University. The details of the course are: course code (EE8072), Category (PE), Contact Periods\/week (3), Teaching hours\/week (3), Practical Hours\/week (0). The total course credits are given in combined syllabus.<\/p>\n<p>For all other ice 6th sem syllabus for be 2017 regulation anna univ you can visit <a href=\"..\/ice-6th-sem-syllabus-for-be-2017-regulation-anna-univ\">Ice 6th Sem syllabus for BE 2017 regulation Anna Univ Subjects<\/a>. For all other Professional Elective I subjects do refer to <a href=\"..\/professional-elective-i-ice-6th-sem-syllabus-for-be-2017-regulation-anna-univ\">Professional Elective I<\/a>. The detail syllabus for mems and nano science is as follows.<\/p>\n<p><h4>Course Objective:<\/h4>\n<ul>\n<li>To provide wide knowledge of semiconductors and solid mechanics to fabricate MEMS devices<\/li>\n<li>To educate on the rudiments of Micro fabrication techniques<\/li>\n<li>To educate on applications of MEMS<\/li>\n<li>To provide wide information dealing with nano material and its necessity<\/li>\n<li>To analyze methods involving preparation of nano scale devices<\/li>\n<\/ul>\n<p><h4>Unit I<\/h4>\n<p>For complete syllabus and results, class timetable and more pls <a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">download iStudy<\/a>. Its a light weight, easy to use, no images, no pdfs platform to make students life easier.<\/p>\n<p><h4>Unit II<\/h4>\n<p><strong> Microsystem Fabrication Process<\/strong><br \/>\nPhotolithography, Ion Implantation, Diffusion, Oxidation: Thermal oxidation-Oxidation by color, Chemical Vapour Depostion, Physical Vapour Deposition: Sputtering, Etching: ChemicalPlasma, Micromaching: Bulk Micromachining &#8211; Surface Micromachining.\n<\/p>\n<p><h4>Unit III<\/h4>\n<p><strong> Polymers and Optical Mems<\/strong><br \/>\nPolymers in MEMS : Polimide &#8211; SU-8 &#8211; Liquid Crystal Polymer (LCP) &#8211; PDMS &#8211; PMMA &#8211;<br \/>\nParylene &#8211; Fluorocarbon, Optical MEMS : Lenses and Mirrors &#8211; Actuators for Active Optical MEMS, Assembly of 3D MEMS &#8211; Foundry process.\n<\/p>\n<p><h4>Unit IV<\/h4>\n<p>For complete syllabus and results, class timetable and more pls <a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">download iStudy<\/a>. Its a light weight, easy to use, no images, no pdfs platform to make students life easier.<\/p>\n<p><h4>Unit V<\/h4>\n<p><strong> Patterning and Preparation Methods<\/strong><br \/>\nBottom up Synthesis &#8211; Top down Approach : Precipitation, Mechanical Milling, Colloidal routes, Self assembly, Vapour phase deposition, Evaporation, Molecular Beam Epitaxy, Atomic Layer Epitaxy, MOMBE, Patterning : Introduction to optical\/UV electron beam and X-ray Lithography systems and processes. Clean rooms: specifications and design, air and water purity, requirements for particular processes.\n<\/p>\n<p><h4>Course Outcome:<\/h4>\n<ol>\n<li>Ability to understand the operation of micro devices, micro systems and their applications.<\/li>\n<li>Ability to design the micro devices, micro systems using the MEMS fabrication process.<\/li>\n<li>Ability to understand the operation of nao devices, nano systems and their applications.<\/li>\n<li>Ability to design nano devices, nano systems using the preparation methods.<\/li>\n<\/ol>\n<p><h4>Text Books:<\/h4>\n<ol>\n<li>Tai Ran Hsu MEMS and Microsystems Design : Manufacture and Nano Scale Engineering, John Wiely and Sons, INC., 2nd Edition, 2008.<\/li>\n<li>A.S. Edelstein and R.C. Cammearata, eds., Nanomaterials: Synthesis, Properties and Applications, (Institute of Physics Publishing, Bristol and Philadelphia, 1996).<\/li>\n<\/ol>\n<p><h4>References:<\/h4>\n<ol>\n<li>Chang Liu, Foundations of MEMS, Pearson Education Inc., 2012.<\/li>\n<li>Mohamed Gad-el-Hak, editor,  The MEMS Handbook, CRC press Baco Raton, 2001.<\/li>\n<li>Nadim Maluf, An Introduction to Micro Electro Mechanical System Design, Artech House, 2000..<\/li>\n<li>G Timp (Editor), Nanotechnology, AIP press\/Springer, 1999.<\/li>\n<li>N John Dinardo, Nanoscale charecterisation of surfaces and Interfaces, Second edition, Weinheim Cambridge, Wiley-VCH, 2000.<\/li>\n<\/li>\n<\/ol>\n<p>For detail syllabus of all other subjects of BE Ice, 2017 regulation do visit <a href=\"..\/category\/ice+6th-sem\">Ice 6th Sem syllabus for 2017 Regulation<\/a>.<\/p>\n<p>Dont forget to <a href=\"https:\/\/play.google.com\/store\/apps\/details?id=ini.istudy\" target=\"_blank\" rel=\"noopener\">download iStudy<\/a> for latest syllabus and results, class timetable and more.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Mems and Nano Science Ice 6th Sem Syllabus for BE 2017 Regulation Anna Univ (Professional Elective I) detail syllabus for Instrumentation &amp; Control Engineering (Ice), 2017 regulation is collected from [&hellip;]<\/p>\n","protected":false},"author":2297,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_bbp_topic_count":0,"_bbp_reply_count":0,"_bbp_total_topic_count":0,"_bbp_total_reply_count":0,"_bbp_voice_count":0,"_bbp_anonymous_reply_count":0,"_bbp_topic_count_hidden":0,"_bbp_reply_count_hidden":0,"_bbp_forum_subforum_count":0,"footnotes":""},"categories":[49,76],"tags":[],"class_list":["post-19757","post","type-post","status-publish","format-standard","hentry","category-6th-sem","category-ice"],"_links":{"self":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts\/19757","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/users\/2297"}],"replies":[{"embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/comments?post=19757"}],"version-history":[{"count":0,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/posts\/19757\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/media?parent=19757"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/categories?post=19757"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.inspirenignite.com\/anna-university\/wp-json\/wp\/v2\/tags?post=19757"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}